Average Co-Inventor Count = 5.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Imec Vzw (2 from 975 patents)
2 patents:
1. 7042091 - Fluorinated hard mask for micropatterning of polymers
2. 6245489 - Fluorinated hard mask for micropatterning of polymers