Samsung Electronics Co., Ltd.

Geunwon Lim

Seokcheon Baek

Junhyoung Kim

Joongshik Shin

Kangmin Kim

Seungmin Song

Kwang-soo Kim

Jaehoon Shin

Jisung Cheon

Hyo-Jung Kim

Hwan Hee Lee

Sangjun Hong

Chungki Min

Gihwan Kim

Sanghyeok Kim

Manjoong Kim

Miso Shin

Jinwoo Park

Junyoung Choi

Dongseog Eun

Byunggon Park

Yoonhwan Son

Ilgyu Choi

Minjun Kang

Myungkeun Lee

Kyeongjin Park

A vertical memory device includes gate electrode structures, channels, first to third division patterns, and a first support layer. The gate electrode structure includes gate electrodes stacked in a first direction, and extends in a second direction. The gate electrode structures are spaced apart from one another in a third direction. The first division pattern extends in the second direction between the gate electrode structures. The second and third division patterns are alternately disposed in the second direction between the gate electrode structures. The first support layer is on the gate electrode structures at substantially the same height as upper portions of the first and second division patterns, and contacts the upper portions of the first and second division patterns. The upper portions of the first and second division patterns are arranged in a zigzag pattern in the second direction in a plan view.

Vertical memory device with multiple support layers

A nonvolatile memory device may include a substrate; a first stacked structure on the substrate; a second stacked structure on the first stacked structure; a channel structure including a first portion passing through the first stacked structure and a second portion passing through the second stacked structure; and a filling structure including a first portion passing through the first stacked structure and extending in a first horizontal direction and a second portion passing through the second stacked structure and extending in the first horizontal direction. The upper end of the first portion of the filling structure may be at a same height as the upper end of the first portion of the channel structure.

Nonvolatile memory device

A three-dimensional semiconductor memory device includes a substrate including a first connection region and a second connection region in a first direction and a cell array region between the first and second connection regions, and a first block structure on the substrate. The first block structure has a first width on the cell array region, the first block structure has a second width on the first connection region, and the first block structure has a third width on the second connection region. The first, second and third widths are parallel to a second direction intersecting the first direction, and the first width is less than the second width and is greater than the third width.

Three-dimensional (3D) semiconductor memory device

A semiconductor device includes a lower structure and a stack structure that extends into a connection region on the lower structure, where the stack structure includes gate pads and mold pads. The mold pads include intermediate mold pads that include first intermediate mold pads and a second intermediate mold pad between a pair of the first intermediate mold pads, each of the first intermediate mold pads has a first length in a first direction, the second intermediate mold pad has a second length in the first direction, greater than the first length, one of the intermediate mold pads includes a mold pad portion and an insulating protrusion portion on the mold pad portion, one of the first intermediate mold pads includes the mold pad portion and the insulating protrusion portion, and a central region of the second intermediate mold pad does not include the insulating protrusion portion.

Semiconductor devices including stack structure having gate region and insulating region

A semiconductor device includes a substrate having a cell array region and a pad region, a stack structure including gate electrodes and mold insulating layers alternately stacked on the substrate and having a staircase shape in the pad region, first separation regions penetrating the stack structure in the pad region, extending in a first direction, and including first and second dummy insulating layers, the first dummy insulating layers covering side walls of the first separation regions and including horizontal portions covering portions of the gate electrodes, and the second dummy insulating layers disposed between the first dummy insulating layers, extending portions extending towards the mold insulating layers from the first dummy insulating layers in a second direction perpendicular to the first direction, second separation regions dividing the stack structure and extending in the first direction, and cell contact plugs penetrating the horizontal portions and connected to the gate electrodes.

Semiconductor device having a stacked structure

Semiconductor devices may include a peripheral circuit structure including circuits, a substrate on the peripheral circuit structure, a pair of word line cut structures extending in a first direction on the substrate, and a memory cell block between the pair of word line cut structures and on the substrate. The memory cell block may include a memory stack structure including gate lines overlapping each other in a vertical direction, an interlayer insulation layer on an edge portion of each of the gate lines, a dam structure extending through the gate lines and the interlayer insulation layer, an intersection direction cut structure extending through the memory stack structure and the interlayer insulation layer in the vertical direction and being spaced apart from the dam structure, and a dummy channel structures between the intersection direction cut structure and the dam structure.

Semiconductor devices and electronic systems including the same

A semiconductor device includes a first substrate; devices on the first substrate; a second substrate on the devices; gate electrodes stacked on the second substrate and spaced apart from each other in a first direction; channel structures penetrating the gate electrodes, extending in the first direction, and including a channel layer; isolation regions penetrating the gate electrodes and extending in a second direction; a through contact plug penetrating the second substrate, extending in the first direction, and electrically connecting the gate electrodes to the devices; a barrier structure spaced apart from the through contact plug and surrounding the through contact plug; and a support structure on the gate electrodes and including support patterns, wherein the support structure has first through regions spaced apart from each other in the second direction on the isolation regions and a second through region in contact with an upper surface of the barrier structure.

Semiconductor devices and data storage systems including the same

A semiconductor includes a lower structure and a stack structure having interlayer insulating layers and horizontal layers alternately stacked on the lower structure. A first dam vertical structure penetrates the stack structure. The first dam vertical structure divides the stack structure into a gate stack region and an insulator stack region. The horizontal layers include gate horizontal layers in the gate stack region and insulating horizontal layers in the insulator stack region. A memory vertical structure and a supporter vertical structure penetrate the gate stack region. Separation structures penetrate the gate stack region. One separation structure includes a first side surface, a second side surface not perpendicular to the first side surface, and a connection side surface extending from the first side surface to the second side surface. The connection side surface is higher than an uppermost gate horizontal layer of the gate horizontal layers.

Semiconductor device and data storage system including the same

A three-dimensional semiconductor memory device may include a first stack block including first stacks arranged in a first direction on a substrate, a second stack block including second stacks arranged in the first direction on the substrate, and a separation structure provided on the substrate between the first stack block and the second stack block. The separation structure may include first mold layers and second mold layers, which are stacked in a vertical direction perpendicular to a top surface of the substrate.

Three-dimensional semiconductor memory device

A vertical memory device includes a gate electrode structure, a channel, an insulation pattern structure, an etch stop structure, and a through via. The gate electrode structure includes gate electrodes spaced apart from each other on a substrate in a first direction perpendicular to an upper surface of the substrate, and each of the gate electrodes extends in a second direction parallel to the upper surface of the substrate. The channel extends in the first direction through the gate electrode structure. The insulation pattern structure extends through the gate electrode structure. The etch stop structure extends through the gate electrode structure and surround at least a portion of a sidewall of the insulation pattern structure, and the etch stop structure includes a filling pattern and an etch stop pattern on a sidewall of the filling pattern. The through via extends in the first direction through the insulation pattern structure.

Vertical memory devices

A device including a gap-fill layer may include an upper layer that on a lower layer that defines a trench that extends from a top surface of the upper layer and towards the lower layer, and the gap filling layer may be a multi-layered structure filling the trench. The gap-filling layer may include a first dielectric layer that fills a first portion of the trench and has a top surface proximate to the top surface of the upper layer, a second dielectric layer that fills a second portion of the trench and has a top surface proximate to the top surface of the upper layer and more recessed toward the lower layer than the top surface of the first dielectric layer, and a third dielectric layer that fills a remaining portion of the trench and covers the top surface of the second dielectric layer.

Gap-fill layers, methods of forming the same, and semiconductor devices manufactured by the methods of forming the same

A three-dimensional semiconductor memory device includes a substrate, an electrode structure including gate electrodes sequentially stacked on the substrate, a source structure between the electrode structure and the substrate, vertical semiconductor patterns passing through the electrode structure and the source structure, a data storage pattern between each of the vertical semiconductor patterns and the electrode structure, and a common source pattern between the source structure and the substrate. The common source pattern has a lower resistivity than the source structure and is connected to the vertical semiconductor patterns through the source structure.

Disclosed is a three-dimensional semiconductor memory device comprising a peripheral circuit structure on a first substrate, a second substrate on the peripheral circuit structure, first to fourth stack structures spaced apart in a first direction on the second substrate, first and second support connectors between the second and third stack structures, third and fourth support connectors between the third and fourth stack structures, and a through dielectric pattern penetrating the first stack structure and the second substrate. A first distance between the first and second support connectors is different from a second distance between the third and fourth support connectors.

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Yongin-si, South Korea

Geunwon Lim