Jordan Valley Semiconductors Ltd.

Jordan Valley Semiconductor Ltd

Gennady Openganden

Matthew Wormington

David Berman

Alexander Krohmal

Isaac Mazor

Boris Yokhin

Amos Gvirtzman

A method for analysis includes directing a converging beam of X-rays toward a surface of a sample having an epitaxial layer formed thereon, and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum including a diffraction peak and fringes due to the epitaxial layer. A characteristic of the fringes is analyzed in order to measure a relaxation of the epitaxial layer.

High-resolution X-ray diffraction measurement with enhanced sensitivity

A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.

Enhancing accuracy of fast high-resolution X-ray diffractometry

Growing community of inventors

Kiryat Yam, Israel

Gennady Openganden