Canon Kabushiki Kaisha

Molecular Imprints, Inc.

Gary Doyle

Weijun Liu

Fen Wan

Gerard M Schmid

Michael Nevin Miller

Niyaz Khusnatdinov

Dwayne L LaBrake

Timothy Brian Stachowiak

Douglas J Resnick

A curable composition can comprise a polymerizable material including a monomer of Formula (1), with R being H or alkyl or alkylaryl, n being 1-4, m being 0-6, Xbeing C-Csubstituted or unsubstituted alkyl, Xbeing CHor H, After forming a cured layer of the curable composition, the cured layer can have an excellent etch resistance.

Curable composition

A nanoimprint lithography method includes contacting a composite polymerizable coating formed from a pretreatment composition and an imprint resist with a nanoimprint lithography template defining recesses. The composite polymerizable coating is polymerized to yield a composite polymeric layer defining a pre-etch plurality of protrusions corresponding to the recesses of the nanoimprint lithography template. The nanoimprint lithography template is separated from the composite polymeric layer. At least one of the pre-etch plurality of protrusions corresponds to a boundary between two of the discrete portions of the imprint resist, and the pre-etch plurality of protrusions have a variation in pre-etch height of &#xb1;10% of a pre-etch average height. The pre-etch plurality of protrusions is etched to yield a post-etch plurality of protrusions having a variation in post-etch height of &#xb1;10% of a post-etch average height, and the pre-etch average height exceeds the post-etch average height.

Substrate pretreatment and etch uniformity in nanoimprint lithography

Methods for forming an imprint lithography template are provided. Materials for forming the imprint lithography template may be etched at different rates based on physical properties of the layers. Additionally, reflectance of the materials may be monitored to provide substantially uniform erosion of the materials.

Template pillar formation

Growing community of inventors

Round Rock, TX, United States of America

Gary Doyle