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Tokyo Electron Limited

Gareth E Guest

Wayne L Johnson

Raphael A Dandl

A plasma pump and method for pumping ions from a first to second region, the pump including a partition member having a through opening defining a plurality of conduits ( ); a group of magnets ( ) to provide magnetic forces that extend to the conduits; and a plurality of electric potential sources ( ) for creating electrostatic fields which accelerate ions from the conduits to the second region.

Plasma vacuum pump

A plasma pumping cell and method for pumping ions from a first region containing a plasma to a second region when the plasma pumping cell is interposed between the first and second regions, the plasma pumping cell including: a partition member ( ) positioned between the first and second regions, the partition member ( ) having a through opening defining a conduit ( ); a plurality of magnets ( ) positioned relative to the conduit in a manner to provide lines of magnetic force that extend through the conduit; a source of free electrons in communication with the conduit; and an electric potential source ( ) disposed relative to the conduit to create an electrostatic field which accelerates ions from the conduit ( ) to the second region.

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La Jolla, CA, United States of America

Gareth E Guest