Applied Materials, Inc.

G Lorimer Miller

Lawrence C Lei

Yu Wen Chang

Joel M Huston

Siqing Lu

Paul F Smith

Quyen Pham

Cecilia Martner

Yu Ping Gu

A method and apparatus are provided for measuring the thickness of a test object. The apparatus includes an eddy current sensor having first and second sensor heads. The sensor heads are positioned to have a predetermined gap therebetween for passage by at least a portion of the test object through the gap. The sensor heads make measurements at given sampling locations on the test object as the test object is moved through the gap. The apparatus also includes a position sensing mechanism to determine positions of the sampling locations on the test object. The apparatus also includes an evaluation circuit in communication with the eddy current sensor and to the position sensing mechanism for determining the thickness of the test object at the sampling locations.

Apparatus and method of dynamically measuring thickness of a layer of a substrate

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Eastham, MA, United States of America

G Lorimer Miller