Kureha Kagaku Kogyo Kabushiki Kaisha

Sumco Corporation

International Business Machines Corporation

Thk Co., Ltd.

Kureha Chemical Industry Company, Limited

Fumihiko Kimura

Yutaka Mukaida

Sakuo Noda

Hitoshi Takita

Toyohiko Nitta

Kazuyoshi Inada

Takeshi Masuda

Hidetoshi Kobayashi

Kohju Watanabe

Kiyonori Umekawa

Mari Toji

Masayuki Tsuji

Yoshikazu Matsuo

Takeshi Hirose

Akihiko Shimizu

Hiroshi Makino

Akira Okano

Kazuhisa Iwanaga

Yohichiroh Ohbayashi

Masakazu Ninomiya

Shigeru Kobayashi

Kobayashi, Hidetoshi

A manufacturing method of an epitaxial silicon wafer, using an epitaxial growth apparatus including a susceptor and a heat ring, includes: determining a surface position of a silicon wafer to be higher than a surface position of a peripheral portion of the susceptor and to be lower than a surface position of the heat ring; and adjusting a gap between the surface position of the silicon wafer and the surface position of the heat ring to control a difference between a film thickness of the epitaxial layer formed on a peripheral portion in a &#x3c;110&#x3e; orientation of the silicon wafer and a film thickness of the epitaxial layer formed on the peripheral portion in a &#x3c;100&#x3e; orientation of the silicon wafer.

Manufacturing method of epitaxial silicon wafer

An object of the present invention is to provide an epitaxial growth apparatus and an epitaxial growth method that can suppress variation in in-face temperature of a semiconductor wafer caused by deflection of a susceptor and manufacture an epitaxial wafers of high quality. Specifically, the present invention provides an epitaxial growth apparatus for forming an epitaxial film on a semiconductor wafer placed in a chamber having a supply port and an exhaust port for a treatment gas, the apparatus comprising: a susceptor for placing the semiconductor wafer thereon within the chamber; and a susceptor support shaft for supporting the susceptor at an underneath portion of the susceptor, wherein the susceptor support shaft has a support column located substantially coaxial with the center of the susceptor, and at least four support arms extending radially from the top end of the support column with equal intervals therebetween.

Epitaxial growth apparatus and epitaxial growth method

A susceptor support shaft for an epitaxial growth apparatus capable of forming a high quality epitaxial film by suppressing in-plane resistance variation of the epitaxial film due to deflection of a susceptor, wherein the susceptor support shaft supports a susceptor at an underneath portion of the susceptor in an epitaxial growth apparatus. The susceptor support shaft includes a support column located substantially coaxial with a center of the susceptor; a plurality of arms extending radially from the support column to positions under a peripheral portion of the susceptor; an arm connecting member connecting tips of the arms next to each other; and support pins extending from the arm connecting member, thereby supporting the susceptor.

A trajectory of motion of the mechanical element is designed by using a three-dimensional curve, referred to as a three-dimensional clothoid curve, in which each of a pitch angle and a yaw angle in a tangential direction is given by a quadratic expression of a curve length or a curve length variable. A trajectory of a machine tool or a contour shape of a workpiece is expressed by using a three-dimensional curve, referred to as a three-dimensional clothoid curve, in which each of a pitch angle and a yaw angle in a tangential direction is given by a quadratic expression of a curve length or a curve length variable to control motion of the machine tool based on the three-dimensional curve.

Design method for industrial product using clothoid curve, industrial products designed by the design method, and method and device for numerical control using the clothoid curve

A design support system comprising a digital document related module for storing a digital document used for a design operation, a geometry data related module for storing geometry data designed during the design operation, and a reference relationship related module for generating reference relationship information (a digital document that includes a reference relationship to geometry data, or geometry data that include a reference relationship to a digital document) that is established between a specific digital document and specific geometry data. To display the reference relationship from the digital document to the geometry data, the digital document related module calls up and displays the digital document, while adding and displaying information to the digital document concerning a link to the reference target geometry data.

Apparatus, system and method for design support for providing information for bi-directional references between design information and geometry information

Disclosed herein are a derivative of dihydroxybenzamide represented by the formula(I): ##STR1## wherein (1) R.sup.1 represents a hydrogen atom or a lower alkyl group and R.sup.2 represents a straight chain-alkyl group of 4 to 12 carbon atoms, a branched chain-alkyl group of 4 to 12 carbon atoms, a cyclo-alkyl group of 4 to 12 carbon atoms, ##STR2## wherein n is an integer of 1 to 6, or a pyridyl group which is substituted or unsubstituted, or (2) R.sup.1 and R.sup.2 are cyclized to make a heterocycle containing amino group represented by the formula ##STR3## wherein X represents a nitrogen atom or a methine and Y represents a hydrogen atom, an alkyl group of 1 to 6 carbon atoms or a phenyl group, and a pharmaceutical composition containing the same.

Derivative of dihydroxybenzamide and a pharmaceutical composition thereof

Novel saccharide derivatives of protocatechualdehyde represented by the general formula (I): ##STR1## wherein R.sup.1 represents a hydrogen atom or a benzoyl group, and R.sup.2 represents an alkyl group. The method for preparing thereof and the use of the compound as antiinflammatory agents.

Saccharide derivatives of protocatechualdehyde

The present invention discloses a method for treating a patient suffering from osteoarthritis comprising administering a physiologically effective amount of pharmaceutical composition containing at least one compound, as an active ingredient, represented by the formula (I): ##STR1## wherein R represents a hydrogen atom or an acyl group; X represents a CHO group, a COOH group, a physiologically acceptable salt thereof or a CH(OR').sub.2 group wherein R' represents an acyl group.

Treating agent for osteroarthritis

Disclosed herein are dialkanoyloxybenzylidene dialkanoate represented by the formula ##STR1## wherein X.sup.1 and X.sup.2 represent respectively alkanoyloxy group and a pharmaceutical composition in dosage unit form which comprises a dosage effective for the treatment of inflammatory disease of the dialkanoyloxybenzylidene dialkanoate as an active ingredient thereof.

Dialkanoyloxybenzylidene dialkanoate

Disclosed herein are dialkanoyloxybenzylidene dialkanoate represented by the formula, ##STR1## wherein X.sup.1 and X.sup.2 represent respectively alkanoyloxy group and a pharmaceutical composition in dosage unit form which comprises a dosage effective for the treatment of inflammatory disease of the dialkanoyloxybenzylidene dialkanoate as an active ingredient thereof.

Growing community of inventors

Tokyo, Japan

Fumihiko Kimura