Tanaka Kikinzoku Kogyo K.k.

Tama-tlo Corporation

Fujio Hiroki

Atsushi Yumoto

Naotake Niwa

Takahisa Yamamoto

Ichiro Shiota

Takashisa Yamamoto

A physical vapor deposition apparatus and a physical vapor deposition method for forming a film of a substance which is hard to be made fine particles even when it is heated by plasma, arc discharge, or the like are provided. It has an evaporation chamberprovided inside it with an evaporation source materialand a heating partfor heating the evaporation source material, a powder supply sourceprovided inside it with a powder, and a film forming chamber, wherein the evaporation source materialis heated by the heating partto produce fine particles (nanoparticles), the fine particles and powder are sprayed out of a supersonic nozzle, are placed on a supersonic gas stream, and are deposited on a substrate for film formationby physical vapor deposition.

Physical vapor deposition apparatus and physical vapor deposition method

A physical vapor deposition system for making microparticles generated by using a non-transfer type plasma torch not generating an outgas even in an ultra-high vacuum environment accelerate by a supersonic gas flow and depositing microparticles on a substrate to form a coating film is provided. Provision is made of an evaporation chamber () having a plasma torch () and an evaporation source () inside it and a film formation chamberhaving a supersonic nozzleand a substrate for film formation. Each plasma torch has a substantially cylindrical electrically conductive anode, a polymer-based or non-polymer-based insulation pipeinserted to the inner side of that and generating less outgas than a phenol resin, and a rod shaped cathodeinserted to the inner side of an insulation pipe. Microparticles are generated from an evaporation source () by a plasma obtained by applying voltages to the anodeand the cathode, ejected from a supersonic nozzle, made to ride on a supersonic gas flow, and deposited by physical vapor deposition onto a substrate for film formation

Physical vapor deposition system

Growing community of inventors

Tokyo, Japan

Fujio Hiroki