Cypress Semiconductor Corporation

Longitude Flash Memory Solutions Ltd.

Silicon Magnetic Systems

Fredrick B Jenne

Krishnaswamy Ramkumar

Sagy Charel Levy

Sam G Geha

Igor G Kouznetsov

Bo Jin

Ryan Tasuo Hirose

Bogdan I Georgescu

Cristinel Zonte

Leonard Vasile Gitlan

Paul Fredrick Ruths

James Paul Myers

Vijay Raghavan

William Koutny

Vijay Srinivasaraghavan

Cynthia Ratnakumar

Eugene Youjun Chen

Sanjeev K Maheshwari

Babak A Taheri

Ravindra Manohar Kapre

Long Hinh

William W C Koutny, Jr

Rakesh B Sethi

Thomas M Mnich

John Kizziar

Jeremy L Warren

William L Stevenson

Sheng Yueh Pai

A semiconductor device including an oxide-nitride-oxide (ONO) structure having a multi-layer charge storing layer and methods of forming the same are provided. Generally, the method involves: (i) forming a first oxide layer of the ONO structure; (ii) forming a multi-layer charge storing layer comprising nitride on a surface of the first oxide layer; and (iii) forming a second oxide layer of the ONO structure on a surface of the multi-layer charge storing layer. Preferably, the charge storing layer comprises at least two silicon oxynitride layers having differing stoichiometric compositions of Oxygen, Nitrogen and/or Silicon. More preferably, the ONO structure is part of a silicon-oxide-nitride-oxide-silicon (SONOS) structure and the semiconductor device is a SONOS memory transistor. Other embodiments are also disclosed.

Oxide-nitride-oxide stack having multiple oxynitride layers

An embodiment of a method of integration of a non-volatile memory device into a logic MOS flow is described. Generally, the method includes: forming a pad dielectric layer of a MOS device above a first region of a substrate; forming a channel of the memory device from a thin film of semiconducting material overlying a surface above a second region of the substrate, the channel connecting a source and drain of the memory device; forming a patterned dielectric stack overlying the channel above the second region, the patterned dielectric stack comprising a tunnel layer, a charge-trapping layer, and a sacrificial top layer; simultaneously removing the sacrificial top layer from the second region of the substrate, and the pad dielectric layer from the first region of the substrate; and simultaneously forming a gate dielectric layer above the first region of the substrate and a blocking dielectric layer above the charge-trapping layer.

Method of ono integration into logic CMOS flow

An embodiment of a semiconductor memory device including a multi-layer charge storing layer and methods of forming the same are described. Generally, the device includes a channel formed from a semiconducting material overlying a surface on a substrate connecting a source and a drain of the memory device; a tunnel oxide layer overlying the channel; and a multi-layer charge storing layer including an oxygen-rich, first oxynitride layer on the tunnel oxide layer in which a stoichiometric composition of the first oxynitride layer results in it being substantially trap free, and an oxygen-lean, second oxynitride layer on the first oxynitride layer in which a stoichiometric composition of the second oxynitride layer results in it being trap dense. In one embodiment, the device comprises a non-planar transistor including a gate having multiple surfaces abutting the channel, and the gate comprises the tunnel oxide layer and the multi-layer charge storing layer.

A semiconductor device and method of manufacturing the same are provided. In one embodiment, method includes forming a first oxide layer over a substrate, forming a silicon-rich, oxygen-rich, oxynitride layer on the first oxide layer, forming a silicon-rich, nitrogen-rich, and oxygen-lean nitride layer over the oxynitride layer, and forming a second oxide layer on the nitride layer. Generally, the nitride layer includes a majority of charge traps distributed in the oxynitride layer and the nitride layer. Optionally, the method further includes forming a middle oxide layer between the oxynitride layer and the nitride layer. Other embodiments are also described.

Sonos stack with split nitride memory layer

A semiconductor device including an oxide-nitride-oxide (ONO) structure having a multi-layer charge storing layer and methods of forming the same are provided. Generally, the method involves: (i) forming a first oxide layer of the ONO structure; (ii) forming a multi-layer charge storing layer comprising nitride on a surface of the first oxide layer; and (iii) forming a second oxide layer of the ONO structure on a surface of the multi-layer charge storing layer. Preferably, the charge storing layer comprises at least two silicon oxynitride layers having differing stochiometric compositions of Oxygen, Nitrogen and/or Silicon. More preferably, the ONO structure is part of a silicon-oxide-nitride-oxide-silicon (SONOS) structure and the semiconductor device is a SONOS memory transistor. Other embodiments are also disclosed.

SONOS stack with split nitride memory layer

Method of ONO integration into logic CMOS flow

A memory is described. Generally, the memory includes a number of non-planar multigate transistors, each including a channel of semiconducting material overlying a surface of a substrate and electrically connecting a source and a drain, a tunnel dielectric layer overlying the channel on at least three sides thereof, and a multi-layer charge-trapping region overlying the tunnel dielectric layer. In one embodiment, the multi-layer charge-trapping region includes a first deuterated layer overlying the tunnel dielectric layer and a first nitride-containing layer overlying the first deuterated layer. Other embodiments are also described.

Nonvolatile charge trap memory device having a deuterated layer in a multi-layer charge-trapping region

A system including a memory architecture is described. In one embodiment, the memory architecture includes an array of non-volatile memory cells, a first independently controlled voltage generation circuit, a plurality of register bits to store programmable values used by the independently controlled voltage generation circuit and a control circuit coupled to the first independently controlled voltage generation circuit. The first independently controlled voltage generation circuit is coupled to supply a positive voltage to the array during program and erase operations so that a magnitude of the positive voltage is applied across a storage note of an accessed memory cell of the array. The plurality of register bits to store programmable values used by the independently controlled voltage generation circuit to control the magnitude of the positive voltage. The control circuit controls a duration of the positive voltage. Other embodiments are also described.

Memory architecture having two independently controlled voltage pumps

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Mountain House, CA, United States of America

Fredrick B Jenne