Delphi Technologies, Inc.

Intel Corporation

Frank Stepniak

Arun K Chaudhuri

Matthew R Walsh

William David Higdon

Shing Yeh

Scott David Brandenburg

Mark Wendell Gose

John Mark Dikeman

Bradley H Carter

Derek B Workman

Pankaj Mithal

Michael J Varnau

A no-flow underfill material and process suitable for underfilling a bumped circuit component. The underfill material initially comprises a dielectric polymer material in which is dispersed a precursor capable of reacting to form an inorganic filler. The underfill process generally entails dispensing the underfill material over terminals on a substrate, and then placing the component on the substrate so that the underfill material is penetrated by the bumps on the component and the bumps contact the terminals on the substrate. The bumps are then reflowed to form solid electrical interconnects that are encapsulated by the resulting underfill layer. The precursor may be reacted to form the inorganic filler either during or after reflow.

No-flow underfill process and material therefor

A process for underfilling a bumped die surface using a lamination step and compound film such that solder bumps on the die are exposed during lamination. The compound film comprises a first layer containing an underfill material and a second layer on the first layer. The underfill material and the second layer comprise polymer materials that differ from each other. The compound film is laminated to the die, preferably at the wafer level, so that the underfill material is forced between the solder bumps and fills spaces between the bumps but does not cover the bumps. In contrast, the second layer covers the solder bumps, but is then selectively removed to re-expose the solder bumps and the underfill material therebetween.

Wafer-applied underfill process

A metal runner that improves the current-carrying capability of solder bumps used to electrically connect a surface-mount circuit device to a substrate. The runner comprises at least one leg portion and a pad portion, with the pad portion having a continuous region and a plurality of separate electrical paths leading to and from the continuous region. The electrical paths are delineated in the pad portion by nonconductive regions defined in the pad portion, with at least some of the nonconductive regions extending into the leg portion. The multiple electrical paths split the current flow to and from the solder bump, distributing the current around the perimeter of the solder bump in a manner that reduces current density in regions of the solder bump where electromigration is most likely.

Flip-chip interconnected with increased current-carrying capability

A tin-lead solder alloy containing copper and optionally silver as its alloying constituents. The solder alloy consists essentially of, by weight, about 55% to about 75% tin, about 11% to about 44% lead, up to about 4% silver, nickel, palladium, platinum and/or gold, greater than 1% to about 10% copper, and incidental impurities. The solder alloys contain a small portion of CuSn intermetallic compounds, and exhibit a melting mechanism in which all but the intermetallic compounds melt within a narrow temperature range, though the actual liquidus temperature of the alloys may be considerably higher, such that the alloys can be treated as requiring peak reflow temperatures of about 250&deg; C. or less. The intermetallic compounds precipitate out to form a diffusion barrier that increases the reliability of solder connections formed therewith.

Lead-based solder alloys containing copper

A conductive adhesive material characterized by metallurgical bonds between electrically-conductive particles dispersed in a polymer matrix of the material. The polymer matrix has a fluxing capability when heated to reduce metal oxides on the surfaces of the particles. At least the outer surfaces of the particles are formed of a fusible material, so that sufficiently heating the conductive adhesive material will reduce metal oxides on the particles, and at least partially melt the fusible metal, enabling the particles to metallurgically bond to each other and to metal surfaces contacted by the adhesive material.

Conductive adhesive material with metallurgically-bonded conductive particles

A solder bumping method and structure for fine solder bump pitches. The method makes use of a semiconductor device having an input/output pad whose surface is provided with a solderable metal layer that serves as the UBM of the solder bump. A sacrificial layer is formed on the surface of the device to surround the metal layer. A plating seed layer is then formed on the metal layer and the surrounding surface of the sacrificial layer, after which a mask is formed on the seed layer and a via is defined in the mask to expose portions of the seed layer overlying the metal layer and the sacrificial layer. A solder material is deposited on the seed layer exposed within the via. The mask is then removed, followed by removal of a portion of the seed layer that is not covered by the solder material, leaving intact that portion of the seed layer beneath the solder material. The sacrificial layer is then removed, including that portion of the sacrificial layer underlying the seed layer, such that a gap is formed between the substrate and the remaining seed layer. Finally, the solder material is reflowed to form a solder bump into which the remaining seed layer is dissolved.

Surface bumping method and structure formed thereby

A method for solder bumping a surface-mount circuit component, as well as electrically and mechanically connecting the component to a conductor on a substrate, and the components and assemblies formed thereby. The method generally entails forming a multilayer metal bump containing discrete layers, including at least one layer of a solder alloy, a first metallic layer having a sufficiently high melting point so as not to melt or deform at the reflow temperature of the solder alloy, and a second metallic layer containing at least one metal that is soluble in the solder alloy. During reflow, the first metallic layer does not collapse, while the solder layer and the second metallic layer readily flow and subsequently bond the first metallic layer to suitable structures on the component and substrate. As a result of the reflow operation, the multilayer metal bump of this invention forms a solder connection with a graded composition, namely, an intermediate region formed primarily by the first metallic layer, and at least one end region that contains a solid solution formed of the solder layer and the first and second metallic layers.

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Noblesville, IN, United States of America

Frank Stepniak