Astex-plasmaquest, Inc.

Frank C Doughty

John E Spencer

A method and apparatus for launching microwave energy to a plasma processing chamber in which the required magnetic field is generated by a permanent magnet structure and the permanent magnet material effectively comprises one or more surfaces of the waveguide structure. The waveguide structure functions as an impedance matching device and controls the field pattern of the launched microwave field to create a uniform plasma. The waveguide launcher may comprise a rectangular waveguide, a circular waveguide, or a coaxial waveguide with permanent magnet material forming the sidewalls of the guide and a magnetization pattern which produces the required microwave electron cyclotron resonance magnetic field, a uniform field absorption pattern, and a rapid decay of the fields away from the resonance zone. In addition, the incorporation of permanent magnet material as a portion of the waveguide structure places the magnetic material in close proximity to the vacuum chamber, allowing for a precisely controlled magnetic field configuration, and a reduction of the amount of permanent magnet material required.

Method and apparatus for launching microwave energy into a plasma processing chamber

In a plasma-producing device, an optimized magnet field for electron cyclotron resonance plasma generation is provided by a shaped pole piece. The shaped pole piece adjusts spacing between the magnet and the resonance zone, creates a convex or concave resonance zone, and decreases stray fields between the resonance zone and the workpiece. For a cylindrical permanent magnet, the pole piece includes a disk adjacent the magnet together with an annular cylindrical sidewall structure axially aligned with the magnet and extending from the base around the permanent magnet. The pole piece directs magnetic field lines into the resonance zone, moving the resonance zone further from the face of the magnet. Additional permanent magnets or magnet arrays may be utilized to control field contours on a local scale. Rather than a permeable material, the sidewall structure may be composed of an annular cylindrical magnetic material having a polarity opposite that of the permanent magnet, creating convex regions in the resonance zone. An annular disk-shaped recurve section at the end of the sidewall structure forms magnetic mirrors keeping the plasma off the pole piece. A recurve section composed of magnetic material having a radial polarity forms convex regions and/or magnetic mirrors within the resonance zone.

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Plano, TX, United States of America

Frank C Doughty