Commissariat a L'energie Atomique

Francois Bourg

Marc Delaunay

Claude Jacquot

Francois Zadworny

Paul Ludwig

Rene Gualandris

Jean-Claude Rocco

Pierre Sermet

Richard Geller

Jean-Marc Mathonnet

An electron cyclotron resonance ion source in which a plasma is confined in a magnetic configuration having a first group of coils located in the plane defined by the tight window of an ultra-high frequency injector and surrounding the latter, supplying the magnetic field creating and confining a plasma as well as a second group of coils supplied in counter-field compared with the first group and surrounding an ion extraction system. Ion extraction takes place in a magnetic field well below that corresponding to the cyclotron resonance. This ion source has numerous applications in the field of thin layer sputtering, microetching, ion implantation, accelerators, etc.

Electron cyclotron resonance ion source

Growing community of inventors

St. Martin d'Heres, France

Francois Bourg