Superd Co. Ltd.

Asml Netherlands B.v.

Chinese Academy of Sciences

Shenzhen Institutes of Advanced Technology

Fei Yan

Fei Li

Ning Liu

Hairong Zheng

Long Meng

Feiyan Cai

Youping Zhang

Chen Wang

Yang Xiao

Lili Niu

Vivek Kumar Jain

Weixuan Hu

Yongchuan Li

Weibao Qiu

Tongfu Li

Yakui Li

Wei Peng

Chengxiang Zhang

Liufeng Geng

Chaowei Xu

A method of hot spot ranking for a patterning process. The method includes obtaining (i) a set of hot spots of a patterning process, (ii) measured values of one or more parameters of the patterning process corresponding to the set of hot spots, and (ii) simulated values of the one or more parameters of the patterning process corresponding to the set of hot spots; determining a measurement feedback based on the measured values and the simulated values of the one or more parameters of the patterning process; and determining, via simulation of a process model of the patterning process, a ranking of a hot spot within the set of hot spots based on the measurement feedback.

Determining hot spot ranking based on wafer measurement

A microfluidic system, including: a container, an ultrasound transmitter assembly, and a phononic crystal plate. The container is configured to accommodate a solution containing microparticles. The ultrasound transmitter assembly is configured to transmit ultrasonic waves to the phononic crystal plate, where the ultrasonic waves have a frequency which is the same as a resonance frequency of the phononic crystal plate. The phononic crystal plate is placed in the solution, and configured to generate a local acoustic field on a surface of the phononic crystal plate under excitation of the ultrasonic waves, and induce an acoustic microstreaming vortex to generate an acoustic streaming shear stress on the microparticles. The phononic crystal plate defines therein cavities, the respective cavities are arranged periodically in the phononic crystal plate, and all the respective cavities are filled with gas.

Microfluidic system and operation method thereof

Disclosed is a microfluidic system based on an artificially structured acoustic field, comprising a microcavity used to accommodate a solution containing particles and a ultrasonic emission device used to emit ultrasound, and further comprising a phononic crystal plate placed in the microcavity. The phononic crystal plate has an artificial cycle structure, and is used to modulate the acoustic field so as to control the particles. Also disclosed is a method of controlling microfluid particles based on an artificially structured acoustic field. In the particular embodiments, since a microcavity, an ultrasonic emission device and a phononic crystal plate are comprised, the ultrasonic emission device is used to emit ultrasound, and the phononic crystal plate has an artificial cycle structure, and is used to modulate the acoustic field so as to control the particles.

Microfluidic system and method of controlling particles based on artificially structured acoustic field

A three-dimensional (3D) image processing method is provided. The method includes receiving from an image source a 3D image containing a plurality of images that are previously compressed, and storing pixel data of the received plurality of images. The method also includes determining that the plurality of images do not have a same number of pixel columns, determining at least one boundaries among the plurality of images, and determining a minimum number of pixel columns and a maximum number of pixel columns of the plurality of images. Further, the method includes adjusting any one of the plurality of images having a column number less than the maximum number such that each of the plurality of images has the maximum number of pixel columns, decompressing the plurality of images, and discarding from each of the decompressed plurality of images by a determined number of last columns, wherein the determined number is the difference between the maximum number and the minimum number.

Three-dimensional (3D) image processing method and system

A three-dimensional (3D) image processing method is provided. The method includes receiving from an image source a 3D image containing compressed first image pixel data and compressed second image pixel data, and storing the received compressed first image pixel data and compressed second image pixel data in a line register group. The method also includes determining a relationship between lines of the compressed first image pixel data and compressed second image pixel data, and using reading and writing operations on the line register group based on the relationship and a predetermined timing sequence to decompress the compressed first image pixel data and compressed second image pixel data.

Growing community of inventors

Shenzhen, China

Fei Yan