Applied Materials, Inc.

University of Cincinnati

Mazak Corporation

Fei Li

Jimmy Iskandar

James Robert Moyne

Michael D Armacost

Jay Lee

Pin Li

Jaskaran Singh

Hossein Davari

Moslem Azamfar

Joseph Frank Sanders, Jr

Vibhor Pandhare

Keita Yamaguchi

Marcella Miller

An electronic device manufacturing system configured to receive, by a first computing system, a request for manufacturing process data request. The system further uses a first cryptographic key controlled by a first entity and a second cryptographic key controlled by a second entity, a database management system to retrieve the manufacturing process data from a data store. The system further obtains, using the database management system, the manufacturing process data stored in the data store. The manufacturing process data is encrypted. The system further sends the encrypted manufacturing process data to a second computing system configured to perform one or more anonymization operations on the manufacturing process data.

Methods and mechanisms for secure data sharing

A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates that have property values that meet threshold values. The method further includes determining, based on the trace data, a dynamic acceptable area outside of guardband limits. The method further includes causing, based on the dynamic acceptable area outside of the guardband limits, performance of a corrective action associated with the substrate processing system.

Guardbands in substrate processing systems

Systems, methods, and computer program products for monitoring a health condition of a tool. Operational data is collected from a machine while the machine is operating in a predetermined manner with the tool in each of at least two known health conditions. A plurality of features is extracted from the operational data, a training dataset is generated from the extracted features, and an analytic model is trained using the training dataset. The analytic model can then be used to determine the health condition of the tool by providing features extracted from operational data received from one or more field machines to the analytic model. The analytic model may then determine a health condition of the tool in the field machine based on like features extracted from the operational data from the one or more field machines.

Tool condition monitoring system

A method includes identifying trace data including a plurality of data points, the trace data being associated with production, via a substrate processing system, of substrates having property values that meet threshold values. The method further includes generating, based on the trace data and a plurality of allowable types of variance, a guardband including an upper limit and a lower limit for fault detection. The method further includes causing, based on the guardband, performance of a corrective action associated with the substrate processing system.

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Cincinnati, OH, United States of America

Fei Li