L'air Liquide, Soci&#xe9;t&#xe9; Anonyme Pour L'etude Et L'exploitation Des Proc&#xe9;d&#xe9;s Georges Claude

American Air Liquide, Inc.

Fan Qin

Jean-Marc Girard

Peng Zhang

Yumin Liu

Gennadiy Itov

Fabrizio Marchegiani

Thomas J Larrabee

Disclosed are silicon and carbon containing film forming compositions comprising a polycarbosilazane polymer or oligomer formulation that consists of silazane-bridged carbosilane monomers, the carbosilane containing at least two &#x2014;SiH&#x2014; moieties, either as terminal groups (&#x2014;SiHR) or embedded in a carbosilane cyclic compound, wherein R is H, a C-Clinear, branched, or cyclic alkyl- group, a C-Clinear, branched, or cyclic alkenyl- group, or combination thereof. Also disclosed are methods of forming a silicon and carbon containing film comprising forming a solution comprising a polycarbosilazane polymer or oligomer formulation and contacting the solution with the substrate via a spin-on coating, spray coating, dip coating, or slit coating technique to form the silicon and carbon containing film.

Cureable formulations for forming low-k dielectric silicon-containing films using polycarbosilazane

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Bear, DE, United States of America

Fan Qin