Nanoscribe Gmbh

Fabian Niesler

Michael Thiel

Roman Reinhard Reiner

Yann Tanguy

A method for producing a three-dimensional structure () in a lithographic material () that can be polymerized and thus solidified using energy input methods, wherein initially a shell wall () of the three-dimensional structure () to be produced is polymerized so as to form a polymerized shell wall () such that a volume () of unpolymerized lithographic material is enclosed using a first, spatially resolving energy input method, wherein the lithographic material () surrounding the polymerized shell wall () is removed in an intermediate development step, wherein subsequently the volume () enclosed by the shell wall () is polymerized using a second energy input method.

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Karlsruhe, Germany

Fabian Niesler