Samsung Electronics Co., Ltd.

Sungkyunkwan University

Eun-Seok Lee

Jin Cheol Shin

Jeong-Ho Bang

Seung-Hun Oh

Kyeong-Seon Shin

Ae-Yong Chung

Sung-Ok Kim

Jin-Suk Hong

Dae-Gab Chi

Dong-Eog Kim

Woo-Mok Son

Young-Seok Jang

Nam-Hoon Lee

Hyun-Chul Kim

Jin-Won Kim

Yun-seok Choi

Gyung-Jin Min

Jae-Chang Lee

In-Gi Kim

Ki-Sang Kang

Kyoung-hwan Kim

Kyeong-seon Shin

Jong-Sun Pyo

Chang-Gil Ryu

Myung-Woo Kim

Geun-Young Song

Ae-yong Chung

Seok-Min Kang

Bon-Ok Koo

Sung-Ki Roh

Je-Hwan Oh

Se-Ra Jang

Hyun-Sang Youn

Gil-Jong Yoo

Byung-Bok Kang

In a method of manufacture, a displacement sensor is provided over a conditioner disk. The conditioner disk is rotated to perform a conditioning process on a polishing surface of a polishing pad. A displacement of the rotating conditioner disk is detected using the displacement sensor during the conditioning process. A height of the conditioner disk is calculated from the detected displacement. An end point of the conditioning process is determined on the polishing surface based on the calculated height.

Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor

Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device

Provided is a substrate cleaning apparatus including: a cleaning bath configured to accommodate a substrate having a first surface and a second surface; a substrate support configured to support the substrate; first and second nozzle bars provided in the cleaning bath to be rotatable in a plane parallel with the substrate, each of the first and the second nozzle bars including a passage; a plurality of nozzles provided along a longitudinal direction of each of the first and the second nozzle bars and configured to spray the cleaning solution from the passage of each of the first and the second nozzle bars to the substrate; and first and second brushes, the first brush provided on a first side of the substrate and configured to clean the first surface and the second brush provided on a second side of the substrate and configured to clean the second surface of the substrate.

Substrate cleaning apparatus

In a method of inspecting a surface of a substrate, a first surface image of the substrate before loaded into a process chamber may be obtained. The first surface image may be processed to detect a defect on the surface of the substrate. Thus, the surfaces of all of the substrate may be inspected during a process may be performed without transferring the substrates.

Method of inspecting a surface of a substrate and apparatus for performing the same

A method and apparatus for providing a traffic information service using a mobile communication terminal are provided. A method of a mobile communication terminal for a traffic information service is provided. The method includes constructing a cluster with at least one neighboring Mobile Station (MS), receiving traffic information from the at least one neighboring MS comprised in the cluster, measuring traffic information using location information of the MS, and transmitting a traffic information message comprising the collected traffic information to a traffic information provision server.

Method and apparatus for providing traffic information service using a mobile communication system

Example embodiments may provide a method of testing semiconductor devices by identifying units of lots and a test tray such that a plurality of lots having semiconductor devices may be continuously tested by a handler. Example embodiments may also provide a handler used to test the semiconductor devices.

Method of testing semiconductor devices and handler used for testing semiconductor devices

A test system of a semiconductor device for a handler remote control is provided. The system includes: a tester for testing the semiconductor device; a handler connected to the tester through a GPIB (General Purpose Instruction Bus) communication cable; a tester server connected to the tester to download a test program, handler remote control program and a handler state check program to the tester; and communication data transmitted and received through the GPIB communication cable between the tester and the handler, wherein the communication data has basic communication data for an electrical test of the semiconductor device, communication data for the handler remote control, and communication data for a handler state check.

Test system of semiconductor device having a handler remote control and method of operating the same

Growing community of inventors

Hwaseong-si, South Korea

Eun-Seok Lee