Osram Opto Semiconductors Gmbh

Osram Oled Gmbh

Erwin Eiling

Marc Philippens

Richard Scheicher

Karl-Heinz Hohaus

Martin Mueller

Andreas Lovich

Ansgar Fischer

Johannes Krijne

Wolfgang Goergen

An arrangement () for holding a substrate () in a material deposition apparatus, which substrate () has a deposition side () upon which material (M) is to be deposited, and which arrangement () comprises: a shadow mask () comprising a number of deposition openings (Di); a support structure () comprising a number of surround openings (Si); and a support structure holding means () for holding the support mask () and/or a substrate holding means () for holding the substrate (), such that the support structure () is on the same side as the deposition side () of the substrate (), and the shadow mask () is positioned between the substrate () and the support structure () such that at least one deposition opening (Di) of the shadow mask () lies within a corresponding surround opening (Si) of the support structure ().

Arrangement for holding a substrate in a material deposition apparatus

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BS Vaals, Netherlands

Erwin Eiling