Kla Tencor Corporation

Erik Kim

Ilya Bezel

Rudolf C Brunner

Rajeev Patil

Anatoly Shchemelinin

Matthew Derstine

Kenneth P Gross

Anant Chimmalgi

Lauren Wilson

Jincheng Wang

Younus Vora

Daniel Scott

Ken Gross

Quang Giang

Dan Scott

Cedric Lasfargues

An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also include one or more sustaining lasers configured to sustain the plasma. The illumination sources include a delivery optical fiber, one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers, and an output of the one or more sustaining lasers to the delivery optical fiber.

System and method for electrodeless plasma ignition in laser-sustained plasma light source

A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures

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Sunnyvale, CA, United States of America

Erik Kim