Fei Comapny

Erik Franken

Maarten Kuijper

Bart Jozef Janssen

Remco Schoenmakers

Yuchen Deng

Uwe Luecken

Holger Kohr

Lingbo Yu

Bart Van Knippenberg

Auke Van Der Heide

Various approaches are provided for automatically focusing particle beams for SPA. In one example, a method includes determining a focus adjustment for a region of a sample to achieve a targeted defocus based on at least one defocus measurement from at least one neighboring region of the sample, and causing an acquisition of an image of the sample at the region with the focus adjustment. In this way, a targeted defocus may be achieved across regions of a sample with reduced auxiliary imaging, thereby providing increased and uniform image quality while reducing the time and thus increasing the throughput of processing.

Automatic particle beam focusing

Growing community of inventors

Nuenen, Netherlands

Erik Franken