Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (1 from 3,783 patents)
2. Metryx Limited (16 patents)
1 patent:
1. 12288702 - Semiconductor wafer mass metrology apparatus and semiconductor wafer mass metrology method