Intel Corporation

Micron Technology Incorporated

Elijah V Karpov

Brian S Doyle

Prashant Majhi

Jack T Kavalieros

Tahir Ghani

Ravi Pillarisetty

Abhishek A Sharma

Robert S Chau

Uday Shah

Charles C Kuo

Niloy Mukherjee

Kaan Oguz

Mark L Doczy

David L Kencke

Manish Chandhok

Matthew V Metz

James S Clarke

Christopher J Jezewski

Kevin O'Brien

Ian A Young

Van H Le

Dmitri E Nikonov

Noriyuki Sato

Kevin Lai Lin

Hui Jae Yoo

James M Blackwell

Willy Rachmady

Yih Wang

Gilbert W Dewey

Marko Radosavljevic

Benjamin Chu-Kung

Rafael Rios

Uygar E Avci

Roza Kotlyar

Sey-Shing Sun

Charles Henry Wallace

Mauro J Kobrinsky

Oleg Golonzka

Leonard P Guler

Florian Gstrein

Rami Hourani

Derchang Kau

Paul Anton Nyhus

Shriram Shivaraman

Nafees Kabir

Roksana Golizadeh Mojarad

Jeffery D Bielefeld

Gianpaolo Spadini

Satyarth Suri

Ramanan Chebiam

Carl H Naylor

Miriam Ruth Reshotko

Tristan A Tronic

Urusa Alaan

Justin Brockman

Kuo-Wei Chang

Michael Christenson

Jiun-Ruey Chen

Eric R Dickey

Markus Kuhn

Arnab Sen Gupta

Jong-Won Sean Lee

Jinwook Lee

Ryan E Arch

Huiying Liu

Michael Stephen Bowen

Eungnak Han

Mohit K Haran

Anup Pancholi

Tejaswi K Indukuri

Gurpreet Singh

Sou-Chi Chang

Ayan Kar

Juan G Alzate Vinasco

Reken Patel

Nicholas A Thomson

Aravind S Killampalli

Johannes A Kalb

Albert Chen

Nathan Strutt

Pulkit Jain

Pedro Quintero

Jay P Gupta

Benjamin Orr

Ashishek Sharma

Robert Willoner

IC interconnect structures including subtractively patterned features. Feature ends may be defined through multiple patterning of multiple cap materials for reduced misregistration. Subtractively patterned features may be lines integrated with damascene vias or with subtractively patterned vias, or may be vias integrated with damascene lines or with subtractively patterned lines. Subtractively patterned vias may be deposited as part of a planar metal layer and defined currently with interconnect lines. Subtractively patterned features may be integrated with air gap isolation structures. Subtractively patterned features may be include a barrier material on the bottom, top, or sidewall. A bottom barrier of a subtractively patterned features may be deposited with an area selective technique to be absent from an underlying interconnect feature. A barrier of a subtractively patterned feature may comprise graphene or a chalcogenide of a metal in the feature or in a seed layer.

Subtractively patterned interconnect structures for integrated circuits

Contact over active gate (COAG) structures with conductive trench contact taps are described. In an example, an integrated circuit structure includes a plurality of gate structures above a substrate, each of the gate structures including a gate insulating layer thereon. A plurality of conductive trench contact structures is alternating with the plurality of gate structures, each of the conductive trench contact structures including a trench insulating layer thereon. One of the plurality of conductive trench contact structures includes a conductive tap structure protruding through the corresponding trench insulating layer. An interlayer dielectric material is above the trench insulating layers and the gate insulating layers. A conductive structure is in direct contact with the conductive tap structure of the one of the plurality of conductive trench contact structures.

Contact over active gate structures with conductive trench contact taps for advanced integrated circuit structure fabrication

The present disclosure is directed to semiconductor deposition tools having a specimen support, at least one ion gun directed to a specimen positioned on the specimen support, at least one source, and at least one electron beam gun directed at the source. In an aspect, the electron beam guns, sources, and ion beam guns are positioned below the specimen support and specimen positioned thereon, which has its top surface facing downward. In another aspect, the method includes activating the electron beam gun and depositing the source material in a trench in the specimen and on surfaces adjacent to the opening of the trench and activating the ion beam gun to remove portions of the source material deposited on the surfaces adjacent to the opening of the trench.

Deposition tool and method for filling deep trenches

Integrated circuitry comprising devices electrically coupled through a plurality of interconnect levels in which lines of a first and second interconnect level are coupled through a planar slab via. An interconnect line may include a horizontal line segment within one of the first or second interconnect levels, and the slab via may be a vertical line segment between the first and second interconnect levels. A planar slab via may comprise one or more layers of conductive material, which have been deposited upon a planarized substrate material that lacks any features that the conductive material must fill. A planar slab via may be subtractively defined concurrently with a horizontal line of one or both of the first or second interconnect levels.

Planar slab vias for integrated circuit interconnects

Embodiments disclosed herein include semiconductor devices with electrostatic discharge (ESD) protection of the transistor devices. In an embodiment, a semiconductor device comprises a semiconductor substrate, where a transistor device is provided on the semiconductor substrate. In an embodiment, the semiconductor device further comprises a stack of routing layers over the semiconductor substrate, and a diode in the stack of routing layers. In an embodiment, the diode is configured to provide electrostatic discharge (ESD) protection to the transistor device.

ESD protection decoupled from diffusion

Methods for fabricating metallization stacks with one or more self-aligned staggered metal lines, and related semiconductor devices, are disclosed. Methods and devices are based on providing a spacer material conformal to bottom metal lines of a first layer of a metallization stack. By carefully designing parameters of the deposition process, the spacer material may be deposited in such a manner that, for each pair of adjacent bottom metal lines of the first layer, an opening in the spacer material is formed in a layer above the bottom metal lines (i.e., in the second layer of the metallization stack), the opening being substantially equidistant to the adjacent bottom metal lines of the first layer. Top metal lines are formed by filling the openings with an electrically conductive material, resulting in the top metal lines being self-aligned and staggered with respect to the bottom metal lines.

Metallization stacks with self-aligned staggered metal lines

Embodiments may relate to a microelectronic package that includes a first plurality of memory cells of a first type coupled with a substrate. The microelectronic package may further include a second plurality of memory cells of a second type communicatively coupled with the substrate such that the first plurality of memory cells is between the substrate and the second plurality of memory cells. Other embodiments may be described or claimed.

Monolithic memory stack

Embodiments disclosed herein include memory bitcells and methods of forming such memory bitcells. In an embodiment, the memory bitcell is part of an embedded DRAM (eDRAM) memory device. In an embodiment, the memory bitcell comprises a substrate and a storage element embedded in the substrate. In an embodiment, the storage element comprises a phase changing material that comprises a binary alloy. In an embodiment, the memory bitcell further comprises a first electrode over a first surface of the storage element, and a second electrode over a second surface of the storage element.

Fabrication of stackable embedded eDRAM using a binary alloy based on antimony

A ferroelectric field-effect transistor (FeFET) includes first and second gate electrodes, source and drain regions, a semiconductor region between and physically connecting the source and drain regions, a first gate dielectric between the semiconductor region and the first gate electrode, and a second gate dielectric between the semiconductor region and the second gate electrode. The first gate dielectric includes a ferroelectric dielectric. In an embodiment, a memory cell includes this FeFET, with the first gate electrode being electrically connected to a wordline and the drain region being electrically connected to a bitline. In another embodiment, a memory array includes wordlines extending in a first direction, bitlines extending in a second direction, and a plurality of such memory cells at crossing regions of the wordlines and the bitlines. In each memory cell, the wordline is a corresponding one of the wordlines and the bitline is a corresponding one of the bitlines.

Double-gated ferroelectric field-effect transistor

Thin film tunnel field effect transistors having relatively increased width are described. In an example, integrated circuit structure includes an insulator structure above a substrate. The insulator structure has a topography that varies along a plane parallel with a global plane of the substrate. A channel material layer is on the insulator structure. The channel material layer is conformal with the topography of the insulator structure. A gate electrode is over a channel portion of the channel material layer on the insulator structure. A first conductive contact is over a source portion of the channel material layer on the insulator structure, the source portion having a first conductivity type. A second conductive contact is over a drain portion of the channel material layer on the insulator structure, the drain portion having a second conductivity type opposite the first conductivity type.

Thin film tunnel field effect transistors having relatively increased width

Embodiments herein describe techniques for a semiconductor device including a semiconductor substrate, a first device of a first wafer, and a second device at back end of a second wafer, where the first device is bonded with the second device. A first metal electrode of the first device within a first dielectric layer is coupled to an n-type oxide TFT having a channel layer that includes an oxide semiconductor material. A second metal electrode of the second device within a second dielectric layer is coupled to p-type organic TFT having a channel layer that includes an organic material. The first dielectric layer is bonded to the second dielectric layer, and the first metal electrode is bonded to the second metal electrode. The n-type oxide TFT and the p-type organic TFT form a symmetrical pair of transistors of a CMOS circuit. Other embodiments may be described and/or claimed.

Thin-film-transistor based complementary metal-oxide-semiconductor (CMOS) circuit

Embodiments may relate to a structure to be used in a neural network. A first column and a second column, both of which are to couple with a substrate. A capacitor structure may be electrically coupled with the first column. An insulator-metal transition (IMT) structure may be coupled with the first column such that the capacitor structure is electrically positioned between the IMT structure and the first column. A resistor structure may further be electrically coupled with the IMT structure and the second column such that the resistor structure is electrically positioned between the second column and the IMT structure. Other embodiments may be described or claimed.

Three-dimensional oscillator structure

AS-T ferroelectric memory cell is provided that include a transistor and a two-terminal selector device. The transistor exhibits a low conductive state and a high conductive state (channel resistance), depending on drive voltage. The two-terminal selector device exhibits one of an ON-state and an OFF-state depending upon whether the transistor is in its low conductive state or its high conductive state. The transistor may be, for instance, a ferroelectric gate vertical transistor. Modulation of a polarization state of ferroelectric material of the vertical transistor may be utilized to switch the state of the selector device. The memory cell may thus selectively be operated in one of an ON-state and an OFF-state depending upon whether the selector device is in its ON-state or OFF-state.

1S-1T ferroelectric memory

Ferroelectric field effect transistors (FeFETs) having band-engineered interface layers are described. In an example, an integrated circuit structure includes a semiconductor channel layer above a substrate. A metal oxide material is on the semiconductor channel layer, the metal oxide material having no net dipole. A ferroelectric oxide material is on the metal oxide material. A gate electrode is on the ferroelectric oxide material, the gate electrode having a first side and a second side opposite the first side. A first source/drain region is at the first side of the gate electrode, and a second source/drain region is at the second side of the gate electrode.

Ferroelectric field effect transistors (FeFETs) having band-engineered interface layer

Growing community of inventors

Santa Clara, CA, United States of America

Elijah V Karpov