Lambda Crossing, Ltd.

Avx Israel, Ltd.

Eitan Avni

Moti Margalit

Avi Neta

Gideon Rogovsky

Elad Irron

A method for etching metal deposited on a substrate, the method comprising: depositing a metal layer above a substrate; coating at least a portion of the deposited metal layer with a photo-resist; pattering the photo-resist; etching the deposited metal layer with an inert gas plasma at an energy density of less than 0.5 Watt/cm, the substrate being maintained at a temperature of less than 50&#xb0; C.; and ashing a resultant crust with an ashing gas, the ashing gas comprising CFand O.

Method suitable for batch ion etching of copper

A precision RF passive component including: a silicon substrate; a first dielectric layer deposited above the silicon substrate; a first metal layer formed above the first dielectric layer; a second dielectric layer formed above the first metal layer; and a second metal layer formed above the second dielectric layer. In one embodiment a passivation layer is added above the second metal layer. In an exemplary embodiment the first metal layer includes a first adhesion layer, a metal sub-layer, and a second adhesion layer; and the second dielectric layer includes a first diffusion barrier layer, a dielectric sub-layer second diffusion barrier. In an exemplary embodiment, the metal sub-layer includes copper. In another exemplary embodiment the dielectric sub-layer includes SiOor SiNbetween diffusion barrier layers including SiN.

Integrated capacitor for RF applications with Ta adhesion layer

A method of producing a PLC based optical component comprising: defining a waveguide; etching a notch thereby defining a facet of the waveguide; and cutting a trench in front of the notch, the cutting being accomplished subsequent to the etching, whereby at least a portion of the trench is displaced from the facet by the notch. The invention also provides for a PLC based optical component comprising: a substrate; a waveguide deposited above the substrate, the waveguide exhibiting a facet; a notch etched in front of the facet of the waveguide; and a trench cut in front of the notch.

Method of coupling fiber to waveguide

A planar lightwave circuit and a method of producing such a planar lightwave circuit, the planar lightwave circuit having an element secured thereon. The planar lightwave circuit comprises: a substrate; a trench cut in the substrate; at least one solder pad deposited on a top surface deposited above the substrate; at least one of a waveguide defined in a layer deposited above the substrate and an optical fiber; and an optical element placed within the trench and in optical communication with the at least one of a waveguide and an optical fiber; at least one metal contact configured on the optical element to be adjacent to the metal pad, the solder pad being connected to the metal contact providing physical support to the optical element and an electrical connection between the metal pad and the metal contact.

Growing community of inventors

Karmiel, Israel

Eitan Avni