Hitachi-high-technologies Corporation

Eisaku Oho

Shigeru Kawamata

Yoshinobu Hoshino

A signal processing unit () of a charged particle microscope calculates a degradation function (H (s)) of an image, on the basis of detection signals () obtained by scanning a charged particle beam () at two types of scanning speeds, a scanning speed within the bandwidths of a detector () and an amplifying circuit at a subsequent stage of the detector, and another scanning speed exceeding the upper limit of the bandwidths. Then, the signal processing unit creates a one-dimensional correction filter for recovering image quality, from an inverse function (H(s)) of the degradation function, and applies the one-dimensional correction filter to the detection signal recorded at the scanning speed exceeding the upper limit of the bandwidths of the detector and the amplifying circuit at a subsequent stage of the detector, or to a two-dimensional image based on the detection signal.

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Kunitachi, Japan

Eisaku Oho