Bridgestone Corporation

Kabushiki Kaisha Toshiba

Nuflare Technology, Inc.

Eiji Sawa

Hiromu Inoue

Yuichiro Mori

Hiroya Fukuda

Takashi Ohashi

Takeshi Fujiwara

Koji Takagi

Hiroyuki Ikeda

Shuichi Tamamushi

Takanao Touya

Yoshio Takizawa

Hidenori Sato

Hiroyuki Tanizaki

Kentaro Okuda

Hiroshi Tsukada

Takahiro Kawagoe

Ryuta Tanaka

Tokuo Okada

Satoshi Imi

Shohei Morikawa

Hitoshi Yaguchi

Miho Saito

Masayuki Akou

Susumu Moriya

According to one embodiment, a pattern characteristic detection apparatus for a photomask includes a detection-data creating portion, a reference-data creating portion, an extracting portion, a first area-setting portion, a detecting portion and an collecting portion. The detection-data creating portion is configured to create detection data on the basis of an optical image of a pattern formed on a photomask. The reference-data creating portion is configured to create reference data of the pattern. The extracting portion is configured to extract a pattern for pattern characteristic detection and positional information of the extracted pattern. The first area-setting portion is configured to set an area where pattern characteristics are to be detected, and configured to extract a target pattern. The detecting portion is configured to detect pattern characteristics of the target pattern within the area. In addition, the collecting portion is configured to collect the detected pattern characteristics.

Pattern characteristic-detection apparatus for photomask and pattern characteristic-detection method for photomask

A method and system for imaging an object to be inspected and obtaining an optical image; creating a reference image from design pattern data; preparing an inspection recipe including one or more templates and parameter settings necessary for the inspection; checking the pattern and the template against each other, and selecting the reference image which corresponds to the template; detecting first and second edges in the selected reference image in accordance with the parameter setting using determined coordinates as a reference; detecting first and second edges in the optical image, this optical image corresponds to the selected reference image; and determining an inspection value by acquiring the difference between the line width of the optical image and the reference image using the first edge and second edge of the reference image and the first edge and second edges of the optical image.

Inspection system and method for inspecting line width and/or positional errors of a pattern

A pair of edges that are located at ends as viewed in the widthwise direction of a design pattern are recognized. On the basis of the edge direction in which the paired edges are recognized, edge points on the design pattern are detected as sub-pixels. The widthwise dimension of the design pattern is calculated on the basis of the edge points. In addition, the widthwise dimension of a circuit pattern is calculated at the same position as the widthwise dimension of the design pattern. On the basis of the calculated widthwise dimensions, the semiconductor wafer circuit pattern is checked.

Size checking method and apparatus

The difference data between the real patter data Sij, and a 5&#xd7;5 window with a noticed pixel in the center and the design pattern data Rij obtained by the design pattern data of the window being shifted in a plurality of directions with respect to the design pattern data Rij is found by a shift direction operation section, and the design pattern data in the direction in which the total of the pixels is minimum is selected from the difference data by a selection section, the difference between the central pixels Sij, Qij of the selected design pattern data and the central pixels Sij, Qij of the windows of the real pattern data is found by a difference operation section, and the difference and a threshold are compared in a defect judgement section, and thereby the pattern inspection of the object is carried out.

Method and apparatus for inspecting patterns

A developing roller (1) includes a highly conductive shaft (2) and a conductive elastic layer (3). When the developing roller carring a one-component developer thereon comes in contact with or in proximity to an image forming body, the developer is supplied from the roller to a surface of the image forming body, thereby forming a visible image on the image forming body surface. The elastic layer (3) has applied to its surface a resin component having an elongation at rupture of less than 10% as measured according to JIS K7113. The developing roller ensures that images of high quality are reproduced without a drop of image density over a long period of time.

Developing roller and apparatus

Electroconductive roller

The electroconductive polyurethane foam according to the present invention is obtained by adding and dispersing, in the composition constituting polyurethane foam, a substance with electron conduction mechanism, and a substance with ionic conduction mechanism and mechanically agitating the resultant mixture in the presence of inert gas. The substance with ionic conduction mechanism is an antistatic agent selected from cationic surfactant, anionic surfactant, ampholytic surfactant, and non-ionic surfactant.

Electroconductive polyurethane foam

A developing roller comprising a conductive layer formed around a shaft carries a non-magnetic one-component developer on its outer surface to form a thin film of the developer and contacts a photoconductor drum having an electrostatic latent image borne on its surface whereby the latent image is developed to form a toner image. In one embodiment, the surface of the conductive layer has a DIN 4776 core roughness depth Rk of 0.5-3.5 .mu.m in a circumferential direction of the roller, and the ratio of circumferential Rk to axial Rk is greater than 1.0. In another embodiment, the surface of the conductive layer is provided with microscopic ridges and recesses which are alternately disposed in a rotational direction to define wavy streaks having a longitudinal direction substantially aligned with an axial direction of the roller.

Developing roller, and method and apparatus for developing latent images

An electrically conductive flexible polyurethane foam having fine and homogeneous cells, being low in swelling by water and superior in dimensional stability can be prepared by mixing an isocyanate terminated urethane prepolymer holding isocyanate monomers therein prepared by reacting polyether polyol(s) holding poly(oxypropylene) chains and not more than 30 weight % of poly(oxyethylene) chains therein with a stoichiometrically excessive amount of an isocyanate component with an aqueous dispersion of electrically conductive carbon particles containing water in excess of the stoichiometric amount necessary to react with the isocyanate monomers in the urethane prepolymer and foaming the mixture in a closed mold having a capacity smaller than the volume of a foam which can be obtained by conducting the foaming of the said mixture of the urethane prepolymer and the aqueous dispersion of electrically conductive carbon particles freely under atmospheric pressure.

Method of making an electrically conductive polyurethane foam

A laminated product for use as motorcar seats, carpets, blankets, sofas, chair seats and the like, excellent in continuation of antistatic effect, characterized in that polyurethane foam having antistatic effect is laminated on the back side of a skin material to add antistatic capacity to the surface of the skin material without losing the comfortable feeling thereof.

Laminated product

Growing community of inventors

Yokohama, Japan

Eiji Sawa