Dainippon Screen Mfg. Co., Ltd.

Dainippon Screen Seizo Kabushiki-kaisha

Eiji Kodama

Tetsuo Sano

Hisayuki Tsujinaka

Takashi Sakamoto

Tetsuo Hohki

Ryuji Kitakado

Hiroyuki Onishi

Takumi Yoshida

Tetsuo Hoki

Masafumi Kawatani

Masamichi Choh

The periphery of an area of a master pattern is expanded by a required number of pixels to define a plurality of master pattern areas two-dimensionally misregistered pixel by pixel, for performing pattern comparison of the respective master pattern areas with an area of an object pattern. The object pattern is deemed defective when all of the comparisons indicate pattern mismatches. The pattern is deemed not defective when at least one comparison indicates a pattern match. Thus, even if an inspected object includes misregistration errors, pattern defects can be detected with high accuracy.

Method of and apparatus for detecting pattern defects

Printed wiring boards (PWBs) applied to this inspection system are previously formed with marks in prescribed positional relation to wiring patterns. Deviation of PWBs with respect to absolute coordinates of the inspection system is detected by reading the marks. The PWBs are sequentially set one by one on a movable table, to be subjected to image acquisition of the marks and inspected areas. A first PWB is image-acquisited whereby obtained binary image data of the inspected area are stored in a memory unit. Thereafter a second PWB is image-acquisited, and in advance to the image acquisition of its inspected area, relative misregistration of the both PWBs is found by deviation data on respective marks of the first and second PWBs. The binary image data of the first PWB is read from the memory unit on the basis of the binary image data of the second PWB. When the binary image data of the first PWB are read, positional correction, i.e., time base correction is performed on the read data to correspond to pixels of the second PWB under image acquisition on the basis of data on the previously found amount of relative misregistration. The data on corresponding pixels of the both PWBs are compared with each other thereby to inspect difference between the patterns of the PWBs on the basis of the result of the comparison.

System for inspecting pattern defects of printed wiring boards

Disclosed herein is an image pickup apparatus for a printed wiring board comprising a solid state image sensor whose light receiving surface is set to be opposed to the surface of the printed wiring board, a main illumination source arranged to satisfy the law of regular reflection on the surface of the printed wiring board with respect to the light receiving surface of the solid state image sensor and a subsidiary illumination source arranged not to satisfy the law of regular reflection with respect to the light receiving surface of the solid state image sensor thereby to supply the light receiving surface with scattering light by strias formed on copper patterns. The amount of regularly reflected light, which is changed depending on the strias formed on the copper patterns, is substantially compensated by the scattering light, so that the amounts of light received by the solid state image sensor relating to the copper patterns are made substantially constant regardless of the radiation pattern of the strias. In addition, the main and subsidiary illumination sources are formed by light emitting diodes thereby to attain technical and economical advantages.

Image pickup apparatus for a printed wiring board

An apparatus for tracing and recording image lines includes a coordinate reader which detects coordinate values of an image to be traced; an image sensor which is movable in a plane relative to a table; a memory in which image signals detected by means of the sensor are written; and a central processing unit which controls the above elements of the apparatus. Trace data are obtained by means of the coordinate reader which detects coordinate values of the image lines. Then, the image is positioned on the table, where record data are obtained based on the trace data by means of the image sensor which generates image signals corresponding exactly to the image.

Method of tracing/recording image lines and apparatus therefor

A method for tracing an object such as an outline of a picture or a line image, wherein the object is sensed by a set of sensing elements arranged in an optical head moving along the object, to detect a position and a direction of the object, wherein the optical head is controlled to trace the object depending on the detected position and the direction of the object, and wherein the object is reproduced by reproduction means which is moved in synchronization with the optical head. Present invention improves this method by moving the optical head along portions of the object, which the sensing elements can discriminate hardly or not at all nor follow the object, according to line segment data which is predetermined and represent a plurality of points of coordinates.

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Kyoto, Japan

Eiji Kodama