Ebara Corporation

Nihon Parkerizing Co., Ltd.

Other

Eiji Hirai

Mitsuru Miyazaki

Koji Maruyama

Takeshi Sakurai

Masaaki Beppu

Kaoru Hamaura

Seiki Mori

Kazuyoshi Kurosawa

Tadashi Kamimura

Yuichiro Hara

Akira Tsujimura

Takayuki Wakae

Yoshio Matsumura

A substrate cleaning deviceincludes a substrate holding unitconfigured to hold a substrate W, a first cleaning unithaving a first cleaning membercaused to come into contact with a first surface WA of the substrate W held by the substrate holding unitto clean the first surface WA, a second cleaning unithaving a second cleaning membercaused to come into contact with the first surface WA of the substrate W held by the substrate holding unitto clean the first surface WA, and a controllerconfigured to control the first and second cleaning unitsso that, when any one of the first cleaning memberand the second cleaning membercleans the first surface WA of the substrate W held by the substrate holding unit, the other cleaning member is at a position apart from the substrate W held by the substrate holding unit

Substrate cleaning device, substrate cleaning apparatus, method for manufacturing cleaned substrate and substrate processing apparatus

The present invention is applicable to composite particles for composite dispersion plating used for forming a self-lubricating composite dispersion coating and a method of plating using such composite particles as well as a plating (coating) using the same. The purpose of the invention is to obtain a composite particle for composite dispersion plating which is comprised of a particle with an excellent capability of reducing the friction and a low or very low specific gravity, and a method of plating using such composite particles. In this invention, each of the composite particles includes a friction-reducing mother or core particle ( ) encapsulated with shell particles ( ) comprised of the same components as a base metal of a composite dispersion plating bath ( ). This provides a composite particle for composite dispersion plating which is comprised of a particle with an excellent capability of reducing the friction and a low or very low specific gravity. As a result, the composite particles can form an eutectic system in a plating layer without addition of any surfactant.

Composite particles for composite dispersion plating and method of plating therewith

A slide member having a highly lubricative and highly abrasion-resistant plating layer formed on the sliding surface thereof. The plating layer contains fine particles of graphite selected from flake graphite, vein graphite and/or amorphous graphite in its metallic matrix. The plating layer has a hardness of not less than 550 in terms of Hv and is produced by using a plating solution containing naphthalene sulfanate of formalin condensate as surface active agent. The matrix is preferable to be a Ni&mdash;P type metallic matrix and the dispersed fine particles of graphite are preferable having a size of 0.1 to 20 &mgr;m and are contained by 0.1 to 10 wt % relative to the matrix.

Slide member

A titanium-containing metallic material having a high heat-resistant and abrasion resistant surface is produced by (A) cleaning a titanium-containing metallic material, (B) first plating the cleaned surface of the metallic material with Cu or Ni by a strike or flash plating method, (C) second plating the first plated surface of the Ti-containing material with Ni, Ni-P alloy or a composite material comprising a Ni-P alloy matrix and fine ceramic particles dispersed in the matrix by an electroplating method, (D) non-oxidatively heat treating the second plated Ti-containing material at 450.degree. C. or more for one hour or more, (E) surface activating the second plated surface of the Ti-containing material, (F) coating the activated surface of the Ti-containing material with a heat and abrasion resistant coating layer comprising a matrix consisting of a Ni-P alloy or cobalt and fine ceramic particles dispersed in the matrix, and optionally, (G) surface-roughening the heat and abrasion-resistant coating layer surface of the Ti-containing material to a R.sub.Z of 1.0 to 10.0 .mu.m, and (H) coating the roughened surface of the Ti-containing material with a solid lubricant coating layer comprising at least one member selected from MoS.sub.2, graphite, boron nitride and F-containing polymer resin.

Process for surface treatment titanium-containing metallic material

Growing community of inventors

Tokyo, Japan

Eiji Hirai