W.c. Heraeus Gmbh & Co Kg

Egon Maier

David Francis Lupton

Harald Manhardt

Bernd Stenger

Ralf Heck

Holger Zingg

Peter Mainz

Rainer J&uuml;ttner

A process for producing a tube target for cathode sputtering plants, in which the tube target is formed from a metallic inner tube (target holder) made of a first material with a first melting point of T &gE;900 K and a metallic outer tube (target) that concentrically surrounds the inner tube and that is made of a second material with a second melting point of T &lE;800 K. The inside diameter of the outer tube and the outside diameter of the inner tube are proportioned in such a way that the two tubes fit together tightly and are mechanically firmly joined. The outer tube is formed by casting the second material in a molten state in a heated, vertical, cylindrical permanent mold, which has a heated mandrel that constitutes the inner tube. After a space between the mold and the inner tube has been filled with the molten second material, a first thermal gradient develops between the inner tube and the mold, a second thermal gradient develops between the bottom and the top of the mold, and the outer tube is simultaneously cooled from the inside to the outside and from the bottom to the top.

Process for producing a tube-shaped cathode sputtering target

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Hasselroth, Germany

Egon Maier