Forschungszentrum Juelich Gmbh

Solayer Gmbh

Forschungszentrum Julich Gmbh

Dzmitry Hrunski

Reinhard Carius

Markus Kress

Florian Peter Schwarz

Stefan Muthmann

Aad Gordijn

Markus Huelsbeck

Marco Seibert

Markus Hülsbeck

The invention relates to a diaphragm assembly of an aperture diaphragm for delimiting the coating region which is operative in the deposition of a layer and to a sputtering device which uses the diaphragm assembly. The diaphragm assembly comprises a main part () which has a passage () delimited by a passage edge. The aim of the invention is to design the diaphragm opening to be temporally and geometrically variable in situ. This is achieved in that the diaphragm assembly has at least one diaphragm plate (″) which is assembled on the main part () so as to be movable in front of the passage () and back. The diaphragm assembly additionally comprises a movement device which is operatively connected to the diaphragm plate (″) in order to carry out the movement thereof.

Diaphragm assembly for delimiting the coating region of a sputter source, and sputtering device

A RF electrode for generating, plasma in a plasma chamber comprising an optical feedthrough. A plasma chamber comprising an RF electrode and a counter-electrode with a substrate support for holding a substrate, wherein a high-frequency alternating field for generating the plasma can be formed between the RF electrode and the counter-electrode. The chamber comprising an RF electrode with an optical feedthrough. A method, for in situ analysis or in situ processing of a layer or plasma in a plasma chamber, wherein the layer is disposed on counter-electrode and an RF electrode is disposed on the side lacing the layer. Selection of an RF electrode having an optical feedthrough, and at least one step in which electromagnetic radiation is supplied through the optical feedthrough for purposes of analysis or processing of the layer or the plasma, and by at least one other step in which the scattered or emitted or reflected radiation is supplied to an analysis unit.

Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer or the plasma in situ

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Aschaffenburg, Germany

Dzmitry Hrunski