Samsung Electronics Co., Ltd.

Dusik Bae

Hyunwoo Lee

Youngwook Kim

Sangkyung Lee

Yongjun Ahn

Jeonghun Lim

JungDae Park

Mira Park

Yoonmi Lee

Kyoungsil Park

Sojung Park

Hyeogki Kim

Dongchol Choi

Jiwoong Shin

Sangyoon Shin

Euihyun Roh

Wonil Choi

A detection device includes a transfer device to travel along a rail while gripping a carrier, and a detection structure mounted on the carrier. The detection structure includes a collector to suck in air, a detector connected to the collector, the detector including a plurality of sensors, a plurality of sensor control boards receiving electrical signals from the plurality of sensors, the plurality of sensor control boards generating, based on the electrical signals, type data and concentration data regarding pollutants included in the air sucked in by the collector, and a communication control board connected to the plurality of sensor control boards.

Pollutant detection devices and monitoring system having the same

Disclosed are a method of processing a substrate and a method of fabricating a semiconductor device using the same. The method of processing a substrate comprises forming a mask layer on a substrate, inspecting the mask layer, and forming a mask pattern based on an inspection result of the mask layer. The operation of inspecting the mask layer comprises using Raman spectrum analysis to detect defects in the mask layer.

Method of processing substrate and method of fabricating semiconductor device using the same

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Changwon-si, South Korea

Dusik Bae