J.a. Woollam Co.

J.a. Wooliam Co., Inc.

Duane E Meyer

Martin M Liphardt

Blaine D Johs

Craig M Herzinger

Ping He

Steven E Green

John A Woollam

James D Welch

Jeffrey S Hale

Galen L Pfeiffer

Jeremy A Van Derslice

Stefan Schoeche

Brian D Guenther

Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.

Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system

In ellipsometer and polarimeter systems, reflective optics including both convex and a concave mirrors that have beam reflecting surfaces, as well as aperture control of beam size to optimize operation with respect to aberration and diffraction effects while achieve the focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved, and further including detectors of electromagnetic radiation that enable optimization of the operation thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.

Beam focusing and reflecting optics with enhanced detector system

Application of detectors of electromagnetic radiation and systems for enabling the optimization thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.

Enhanced detector operation made possible by application of a functional plurality of gratings and combination dichroic beam splitter-prisms

A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.

Mounting for deviation angle self compensating substantially achromatic retarder

A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.

Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation

A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.

Deviation angle self compensating substantially achromatic retarder

Disclosed are system for and method of analyzing substantially the exact same spot size on a sample system with at least two wavelengths for which the focal lengths do not vary more than within an acceptable amount.

Control of beam spot size in ellipsometer and the like systems

A monochromator system applicable in spectrophotometer, polarimeter and ellipsometer systems which operate over a large range of wavelengths, including a stage which enables position adjustment of the location of a source of electromagnetic radiation in lateral (X), longitudinal (Y) and vertical (Z) directions, from a common location outside an enclosure, and including multiple detector systems mounted in a manner which allows easily, sequentially, via mechanical motion, placing a first and then a second thereof so as to receive a beam of electromagnetic radiation.

Monochromator system and applications thereof

A system for translating applied linear motion into a slit width present between facing edges of two 'Knife-blade' elements. In its preferred embodiment, two slide assemblies are firmly affixed to a frame such that loci of motion of slide elements thereof form an acute angle therebetween. Lower ends of each slide element, as viewed in vertically oriented frontal elevation, allow horizontal motion therebetween when said slide element lower ends are caused to simultaneously move vertically. An alternative embodiment provides that the slide elements be oriented such that said loci of motion of said slide elements are, for instance, horizontally directed. In its preferred embodiment the simultaneous motion of the slide elements is effected by a motor, preferably a precisely controlled computer driven stepper motor, which motor causes a threaded shaft therein to move vertically as a result of screw thread translation of motor imparted rotational motion to said threaded shaft.

Growing community of inventors

Lincoln, NE, United States of America

Duane E Meyer