Samsung Electronics Co., Ltd.

Sk Telecom Company, Ltd.

Lg Electronics Inc.

Donghoon Han

Byeungwoo Jeon

Joohee Moon

Yunglyul Lee

Haekwang Kim

HaYoon Kim

Daeyeon Kim

Kioh Kim

Kyuho Lee

Seoyoung Maeng

Jongyong Bae

Hongtaek Lim

Suncheul Kim

Minjoon Kim

Byounghoon Ji

Minsoo Kim

Donghyun Lee

Seungyong Shin

Kyoungtae Kim

Changkyu Hwang

Junghyeon Kim

Sungkwon Jang

Oleg Feygenson

Jinho Cho

Uihyoung Lee

Jiho Uh

Sanggon Shin

Youngsang Lee

Jeonghwa Kim

Kuangjun An

Yunchul Shin

Kwangpyo Hong

An edge ring includes an annular body portion having a bottom surface and a top surface, a first step portion extending along an inner periphery of the body portion and having an annular first bottom surface positioned higher than the bottom surface of the body portion by a first height, an inclined portion extending along an inner periphery of the first step portion and having an inclined bottom surface extending at a first angle with respect to a first plane in which the first bottom surface is placed, a second step portion extending along an inner periphery of the inclined portion and having a second bottom surface positioned higher than the bottom surface of the body portion by a second height greater than the first height, and a plurality of passages extending outwardly from the first bottom surface of the first step portion at a second angle with respect to the first bottom surface.

Edge ring, substrate processing apparatus having the same and method of manufacturing semiconductor device using the apparatus

An integrated circuit device includes a substrate including an active region defined by a device isolation layer, the substrate defining a gate trench extending across the active region, a gate dielectric layer conformally covering an inner surface of the gate trench, and a gate electrode filling the gate trench on the gate dielectric layer. The gate electrode is composed of crystal grains of a single metal, and a diagonal length of at least one of the crystal grains is greater than a height of the active region that is in contact with the gate electrode.

Integrated circuit device

Provided is a flow rate control method, including: supplying fluid from a valve to a first sensor; measuring, by the first sensor, a first temperature of the fluid, and heating the fluid; measuring, by a second sensor, a second temperature of the heated fluid, and determining, by a controller, a first flow rate of the fluid based on comparison between the first temperature and the second temperature; supplying the fluid to a chamber and supplying an ignition voltage to the chamber through a radio frequency (RF) power source; measuring, by a third sensor, the ignition voltage; comparing, by the controller, the ignition voltage and a reference voltage to determine a second flow rate of the fluid; and controlling a supply of the fluid from the valve based on at least one of the first flow rate and or the second flow rate.

Flow control method using plasma system

A vacuum chuck includes a pedestal including a first surface on which a substrate may be mounted. The first surface of the substrate may include a vacuum hole to provide a vacuum pressure below the substrate, a vacuum groove connected to the vacuum hole, and a gas hole surrounding the vacuum groove to transmit a bottom gas to the substrate. A vacuum pipe may be provided to connect to the vacuum hole, and a gas pipe may be provided to connect to the gas hole. The diameter of the vacuum hole may be about 2 to about 3 micrometers, and a width of the vacuum groove may be about 1.6 to about 2.5 micrometers.

Vacuum chuck, substrate processing apparatus including the same and related method of manufacture

A gas supply for a layer deposition apparatus including a plurality of charge distribution lines connected to a first gas supply source and a plurality of gas filling tanks respectively connected to the charge distribution lines is disclosed. Each of the gas filling tanks may be pressurized with a first gas from the first gas supply source, and a gas supply line connected to a second gas supply source. The apparatus may include a multi-dosing valve assembly connected to outlet portions of the gas filling tanks and configured to supply, sequentially, the first gas from the gas filling tanks to a process chamber. The multi-dosing valve assembly may include a flow path block having a main supply line connected to the process chamber and a backflow prevention valve block fastened to the flow path block and having an opening/closing valve therein.

Gas supply and layer deposition apparatus including the same

Provided in a smart shoe module mounted to a smart shoe for analyzing the motion of a wearer and providing various functions, the smart shoe module comprising: an upper case which forms an upper outer experience of a pressure switch and elastically behaves by means of a pressure, which is applied in a first direction and has a particular value or larger, in order to accurately measure the motion of the wearer by measuring the pressure generated during walking of a wearer, as digital signals such as on-signal and an off-signal, and, moreover, minimize a manufacturing tolerance so as to prevent an error in distinguishing between an on-signal and an off-signal from being caused by the pressure generated during walking of the wearer; a lower case coupled to the lower end of the upper case and forming a lower end outer experience of the pressure switch; a substance amounted to the inside of the upper case and generating a signal in the first circuit unit through the elastic behavior; and a control unit for processing the signal generated in the first circuit unit.

Smart shoe module

The present invention relates to an electronic pen and a control method therefor. The electronic pen is configured to: receive an infrared signal from a transmitting module located at a predetermined distance or more from the electronic pen; measure the time when the infrared signal is received; calculate a distance between the transmitting module and the electronic pen on the basis of the measured time; calculate two-dimensional (2D) coordinates of the electronic pen on the basis of the calculation result; output ink to a writing target object on the basis of the calculated 2D coordinates; when the distance between a sensor module and a first end of the pen point is within the predetermined distance, adjust the magnetic pole of a first magnetic body and the magnetic pole of a second magnetic body so that the magnetic pole of the first magnetic body and the magnetic pole of the second magnetic body become identical.

Display device and control method therefor

A method for encoding pixels in an image, includes: encoding an offset to be applied to a reference frame; generating predicted pixels of the pixels in the image, based on interpolating pixels in the reference frame and then adding the offset to the interpolated pixels; and encoding residual signals that are differences between the pixels in the image and the predicted pixels, wherein the encoding of the residual signals comprises: skipping both transform and quantization with respect to residual signals of which an encoding scheme corresponds to skipping of both transform and quantization, the encoding scheme related to transform and quantization, skipping transform and performing quantization with respect to residual signals of which the encoding scheme corresponds to skipping of transform, and performing transform and quantization with respect to residual signals of which the encoding scheme corresponds to skipping neither transform nor quantization.

Method and apparatus for generating a reference frame and method and apparatus for encoding/decoding image using the same

An apparatus for generating a reference frame is disclosed including: an interpolation unit for interpolating a reference frame per fractional pixel; a virtual encoder for determining a block mode of a current frame and a motion vector according to the block mode by using an interpolated reference frame; an offset calculator for calculating an offset for each pixel of the interpolated reference frame by using the block mode and the motion vector; and an offset adder for generating an offset interpolated reference frame by adding the offset for each pixel to each pixel of the interpolated reference frame. By adding the offset calculated according to the block mode to the reference frame for the inter prediction and making the reference frame to be used for the motion estimation and compensation similar to the current frame to be encoded, motion prediction is accurate and compression efficiency is improved.

An image encoding and decoding method comprising: a coefficient calculator for calculating adaptive interpolation filter coefficient of a current frame; an image encoder for interpolating reference frames using the adaptive interpolation filter coefficient of the current frame and encoding the current frame using the interpolated reference frames; a filter flag encoder for generating and encoding a coefficient-inserted flag or coefficient non-inserted flag as a filter flag according to the adaptive interpolation filter coefficient of the current frame; a coefficient encoder for encoding the adaptive interpolation filter coefficient of the current frame when the filter flag is a coefficient-inserted flag; and a bit stream generator for generating and outputting a bit stream, which includes the encoded current frame and encoded filter flag, and further includes encoded adaptive interpolation filter coefficient of the current frame when the filter flag is the coefficient-inserted flag.

Image encoding/decoding method and device using coefficients of adaptive interpolation filter

An image encoding/decoding method and apparatus using coefficients of an adaptive interpolation filter are disclosed including: a coefficient calculator for calculating adaptive interpolation filter coefficient of a current frame; an image encoder for interpolating reference frames using the adaptive interpolation filter coefficient of the current frame and encoding the current frame using the interpolated reference frames; a filter flag encoder for generating and encoding a coefficient-inserted flag or coefficient non-inserted flag as a filter flag according to the adaptive interpolation filter coefficient of the current frame; a coefficient encoder for encoding the adaptive interpolation filter coefficient of the current frame when the filter flag is a coefficient-inserted flag; and a bit stream generator for generating and outputting a bit stream, which includes the encoded current frame and encoded filter flag, and further includes encoded adaptive interpolation filter coefficient of the current frame when the filter flag is the coefficient-inserted flag.

Growing community of inventors

Seoul, South Korea

Donghoon Han