Samsung Electronics Co., Ltd.

Donggyu Heo

Dongsoo Woo

Jaeho Hong

Hyun-Jung Lee

Namho Jeon

Jin-Seong Lee

Disclosed are a semiconductor memory device and a method of manufacturing the same. The semiconductor memory device includes a device isolation layer defining active regions of a substrate, and gate lines buried in the substrate and extending across the active regions. Each of the gate lines includes a conductive layer, a liner layer disposed between and separating the conductive layer and the substrate, and a first work function adjusting layer disposed on the conductive layer and the liner layer. The first work function adjusting layer includes a first work function adjusting material. A work function of the first work function adjusting layer is less than those of the conductive layer and the liner layer.

Growing community of inventors

Suwon-si, South Korea

Donggyu Heo