International Business Machines Corporation

Samsung Electronics Co., Ltd.

Freescale Semiconductor,inc.

Globalfoundries Singapore Pte. Ltd.

Dong Hee Yu

Daniel A Corliss

Sohan Singh Mehta

Hyung-Rae Lee

Niall Shepherd

A system and method are provided for automatic dose-correction recipe generation, the system including a dose-correction recipe generator, a reticle data unit in signal communication with the recipe generator, a slit data unit in signal communication with the recipe generator, a process data unit in signal communication with the recipe generator, a wafer data unit in signal communication with the recipe generator, a control unit in signal communication with the recipe generator, and an output unit or a storage unit in signal communication with the control unit; and the method including receiving a current reticle data set and a previous reticle data set, receiving a current slit data set and a previous slit data set, receiving a process condition, receiving a wafer condition, automatically generating a dose-correction recipe in accordance with the received reticle, slit, process and wafer information, and controlling a dose in accordance with the generated recipe.

Semiconductor intra-field dose correction

Growing community of inventors

Kyunggi-do, South Korea

Dong Hee Yu