Industrial Technology Research Institute

Ding-Shiang Wang

Ming-Sheng Leu

Tai-Sheng Chen

Jia-Jen Chang

Chin-Te Shih

A manufacturing method of the ESD protection device includes the following steps. A surface treatment is performed on the substrate. A link layer is formed on the substrate after the surface treatment, wherein a material of the link layer includes a metal material. A progressive layer is formed on the link layer, wherein a material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. A composite layer is formed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1&#xd7;10to 1&#xd7;10&#x3a9;/sq.

Manufacturing method of ESD protection device

An ESD protection composite structure includes a link layer, a progressive layer, and a composite layer. The link layer is used for disposing the ESD protection composite structure on a substrate, wherein a material of the link layer includes a metal material. The progressive layer is disposed on the link layer, wherein the material of the progressive layer includes a non-stoichiometric metal oxide material, and an oxygen concentration in the non-stoichiometric metal oxide material is increased gradually away from the substrate in a thickness direction of the progressive layer. The composite layer is disposed on the progressive layer, wherein the composite layer includes a stoichiometric metal oxide material and a non-stoichiometric metal oxide material, and a ratio of the non-stoichiometric metal oxide material and the stoichiometric metal oxide material in the composite layer may make a sheet resistance value of the composite layer 1&#xd7;10&#x3a9;/sq to 1&#xd7;10&#x3a9;/sq.

ESD protection composite structure, ESD protection device, and manufacturing method thereof

A method of fabricating a graphite composite structure includes the following steps. An amorphous carbon layer having a short-range ordered structure region in a range from 50% to 100% is provided. At least one force is locally applied on a surface of the amorphous carbon layer to form at least one stressed region. An annealing process is performed on the amorphous carbon layer so as to form at least one long-range ordered graphite structure in the at least one stressed region. The at least one long-range ordered graphite structure includes a stack structure including a plurality of (002) planes. An angle between an extension direction of the (002) planes and the surface of the amorphous carbon layer is in a range from 45 degrees or more to 90 degrees or less.

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Tainan, Taiwan

Ding-Shiang Wang