Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.

Guangzhou Xiaopeng Motors Technology Co., Ltd.

Di Zhan

Guoliang Ye

Tianjian Liu

A wafer structure, a method for manufacturing the wafer structure, and a chip structure are provided. In a case that two wafers are bonded together, an opening extending through a substrate of one of the wafers is formed at a back surface of the wafer, and a concave-convex structure is formed in the dielectric layer under the opening. At least one of concave portions of the concave-convex structure extends to expose the interconnection layer of the wafer structure. A pad is formed on the concave-convex structure by filling the concave-convex structure, and the pad has the same concave-convex arrangement as the concave-convex structure. In this way, the pad has a concave-convex surface, such that a contact surface area of the pad is effectively increased without increasing a floor space of the pad.

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Hubei, China

Di Zhan