Litton Systems, Inc.

Dhirubhai Patel

Leo K Lam

William P Debley

Radhakrishna Chakravarthy Mandyam

Leo Lam

William Debley

Radhakrishna Mandyam

The present invention provides a method for shaping a mask to reduce coating non-uniformity in the radial direction. A test run of the ion beam sputtering system coats a stationary glass plate having the same area and shape as the platen. The resulting coating thickness is measured across the surface of the glass plate and plotted as a function of position. This is the plot of the flux distribution. The coating rate pattern is determined by coating thickness by coating time. The desired width of the mask, which takes the form of a segment of a radial band is adjusted to obtain the desired average coating rate for the entire segment, masked and unmasked. This is repeated for each radial band. All these radial widths put together design the functional form of the mask, the use of which provides a uniform coating of the platen in a radial direction.

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West Hills, CA, United States of America

Dhirubhai Patel