International Business Machines Corporation

Globalfoundries Inc.

Dennis P Hogan

Harold G Linde

Ronald A Warren

Robert K Leidy

Charles Arthur Whiting

Scott A Cummings

Gregory S Jankowski

Jeffrey J Grimes

Christopher Edward Walsh

Alfred A Rouleau, Iii

Methods and apparatus for adjusting an alignment of a movable component relative to a substrate holder. An alignment tool is placed on the substrate holder. A nozzle is coupled with the movable component. The movable component and the nozzle are positioned such that a planar surface of the movable component contact a planar surface of the alignment tool, and the nozzle has a non-contacting relationship with the alignment tool. The planar surface of the movable component is leveled to be parallel with the planar surface of the alignment tool.

Nozzle alignment tool for a fluid dispensing apparatus

A resized wafer using a negative photoresist ring, methods of manufacture and design structures thereof are disclosed. The method includes forming a ring within a radius of a wafer. The method also includes patterning a photoresist formed on the wafer, by exposing the photoresist to energy. Additionally, the method includes forming troughs in a substrate of the wafer based on the patterning of the photoresist, wherein the ring blocks formation of the troughs underneath the ring. The method also includes filling the troughs with a metal and resizing the wafer at an area of the ring.

Resized wafer with a negative photoresist ring and design structures thereof

A fluid delivery system that includes a fluid delivery tool having a connector element and a location for holding a fluid container. The fluid container location of the tool has a replaceable template with a first key element portion. The fluid delivery system also includes a fluid container having a connector portion for connecting the fluid container to the connector element of the fluid delivery tool so that the fluid in the fluid container may be delivered to the fluid delivery tool. The fluid container may also have a second key element portion distinct from its connector portion and configured to mate with the first key element portion of the tool template. Alternatively, the fluid container may have a body portion integral with and distinct from its connector portion, and a key element is provided on at least a portion of the fluid container body portion and configured to mate with the first key element portion of the tool template. In this configuration, the key element may be removable from or permanently attached to the body portion of the fluid container. The fluid delivery system ensures that only a fluid container key element capable of mating with the key element portion of the template presently located in the fluid delivery tool may be inserted in the container holding location of the fluid delivery tool.

Fluid container with a keying means to prevent improper fluid loading in a fluid delivery tool and a system including such fluid container and fluid delivery tool

A method of processing a substrate. A polymer is applied to a substrate. A portion of the polymer is not retained on the substrate and is collected by a catch basin. The catch basin is cleaned by exposing the catch basin and collected polymer to a material comprising acetic acid.

Resist bowl cleaning

A composition of matter comprising a polyamic acid/ester having an amide pendant group directly substituting an acid site of the polyamic acid is provided, which composition when cured provides a colored polymer film when the amide group is a chromophore. The resulting polymer which may be applied as a film to semiconductor chips to provide an optically sensitive semiconductor chip comprises a partially imidized polyamic acid wherein an amide pendant group is directly attached to one acid moiety of the polyamic acid and the other acid group imidized with the adjacent amino group of the polyamic acid. The polymers are useful as optical filters on semiconductor chips and for photoresist applications.

Environmentally stable optical filter materials

There is provided, a stabilized multi-layered colored filter structure useful in a digital color camera and method for making same. The method involves effecting reaction between a polyfunctional organosilicon material, such as a hexaorganosilazane with at least one phenolic resist containing an organic dye color forming filter, in a multi-layered structure of color filters on a silicon chip.

Stabilized multi-layered structure of color filters on a silicon chip

A process is disclosed for making circuit elements by photolithography comprising depositing an antireflective polyimide or polyimide precursor layer on a substrate and heating the substrate at 200.degree. C. to 500.degree. to provide a functional integrated circuit element that includes an antireflective polyimide layer. The antireflective polyimide layer contains a sufficient concentration of at least one chromophore to give rise to an absorbance sufficient to attenuate actinic radiation at 405 or 436 nm. Preferred chromophores include those arising from perylenes, naphthalenes and anthraquinones. The chromophore may reside in a dye which is a component of the polyimide coating mixture or it may reside in a residue which is incorporated into the polyimide itself.

Polyimide and a semiconductor prepared therefrom

Antireflective polymide dielectric for photolithography

A process is disclosed for making circuit elements by photolithography comprising depositing an antireflective polyimide or polyimide precursor layer on a substrate and heating the substrate at 200.degree. C. to 500.degree. C. to provide a functional integrated circuit element that includes an antireflective polyimide layer. The antireflective polyimide layer contains a sufficient concentration of at least one chromophore to give rise to an absorbance sufficient to attenuate actinic radiation at 405 or 436 nm. Preferred chromophores include those arising from perylenes, naphthalenes and anthraquinones. The chromophore may reside in a dye which is a component of the polyimide coating mixture or it may reside in a residue which is incorporated into the polyimide itself.

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Jericho, VT, United States of America

Dennis P Hogan