Semiconductor Manufacturing International (shanghai) Corporation

Semiconductor Manufacturing International (beijing) Corporation

Wacker Chemie Ag

Deng Feng Ji

Chen Xiao Wang

Jun Yang

Hong Tao Liu

Ying Nan Li

You He Sha

Mark Sha

Shuai (Tony) Tian

Semiconductor structures and fabrication methods are provided. The semiconductor structure includes a semiconductor substrate having a dielectric structure and having at least a first region; a plurality of first openings formed in the dielectric structure in the first region; a first barrier member formed in each of the plurality of the first openings; a plurality of second openings formed between adjacent first barrier members and with sidewall surfaces exposing sidewall surfaces of the first barrier members; and a second barrier member formed in each of the plurality second openings.

Semiconductor structure and fabrication method thereof

Semiconductor structures and fabrication methods are provided. An exemplary fabrication method includes providing a semiconductor substrate having at least a first region; forming a dielectric structure over the semiconductor substrate; forming a plurality of first openings in the dielectric structure in the first region by removing portions of the dielectric structure in the first region; forming a first barrier member in each of the plurality of first openings; forming second openings with sidewall surfaces exposing sidewall surfaces of the first barrier members by removing portions of the dielectric structure between adjacent first openings; and forming a second barrier member in each of the plurality of second openings.

Epoxy silane oligomers are prepared from a glycidoxypropyl alkoxysilane in the presence of an alcohol and an esterification and/or transesterification catalyst, and have improved storage stability. The oligomers are particularly useful as scrub-resistant additives for aqueous architectural coatings.

Process for silane oligomer composition preparation and use thereof

Growing community of inventors

Shanghai, China

Deng Feng Ji