Applied Materials, Inc.

Debkalpo Das

Raman K Nurani

Bharath Ram Sundar

Ramachandran Subramanian

Bibhavendra Singh

A method includes obtaining sensor data associated with a deposition process performed in a process chamber to deposit film on a surface of a substrate. The method further includes generating a plurality of physics based outputs using a transformation function and the sensor data. The method further includes mapping the physics based outputs to a training set. The method further includes training a virtual model based on the training set and the sensor data, wherein the virtual model is trained to generate predictive metrology data associated with the film.

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Tamil Nadu, India

Debkalpo Das