Taiwan Semiconductor Manufacturing Comp. Ltd.

De-Jian Liu

Hung-Chih Lin

Mill-Jer Wang

Ching-Nen Peng

Sen-Kuei Hsu

Wei-Hsun Lin

A testing apparatus with reduced warping of the probe card and a method of reducing warping of a probe card of a testing apparatus are disclosed. The testing apparatus can include a testing head and a platform opposite the testing head, where the testing head and platform move relative to one another to bring a sample into contact with probing tips of the testing apparatus. The testing head can include a probe card printed circuit board, a stiffener, a discontinuous backer and a plurality of probing tips. The stiffener can be coupled to and reinforcing the probe card. The discontinuous backer can extend from the probe card to the stiffener, and can include at least one unfilled void extending from the stiffener to the probe card. The plurality of probing tips can extend from a distal end of the testing head.

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Jhubei, Taiwan

De-Jian Liu