Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

W. Blosch Ag

Daniel Rademacher

Michael Vergöhl

Tobias Zickenrott

Gunter Brauer

Stefan Bruns

Hans-Ulrich Kricheldorf

Günter Bräuer

Peter Weiss

Thomas Neubert

Oliver Werner

Michael Vergohl

Michael VERGÖHL

The invention relates to the deposition of optical precision films with high uniformity, precision, particle freedom and low absorption on the substrate. For this purpose, a method and a device are proposed. The approach is the use of target materials and also possibly of surfaces in the sputtering field. Particularly high uniformity and also particularly low residual absorption are achieved with these materials. The invention is suitable for the production of optical thin-film filters, as are used for example in laser material machining, laser components, optical sensors for measuring technology, or in medical diagnostics.

Method and device for producing uniform films on moving substrates and films produced in this way

The invention relates to methods and devices for producing one or more low-particle layers on substrates in a vacuum. The layers are deposited onto the substrate from a cylindrical source material, optionally together with a reactive gas component, by means of magnetron sputtering. The layer is deposited against the force of gravity in a sputter-up method. During the method or within the device, the structure or stochiometric atomic composition of the layers can optionally be modified using a plasma source. Multiple sputtering sources with different source materials can be provided in the device such that multiple layers of different compositions can be applied on the substrate at a high speed in one process.

Method and apparatus for producing low-particle layers on substrates

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Braunschweig, Germany

Daniel Rademacher