Carl Zeiss Industrielle Messtechnik Gmbh

Carl Zeiss Microscopy Gmbh

Daniel Plohmann

Thomas Engel

Nils Haverkamp

Dominik Seitz

Tobias Held

Tomas Aidukas

Oliver Rettenmaier

Sören Schmidt

Michael Baum

A method for generating a depth map of a region of a surface of a workpiece includes receiving a stack of images. The images image the region of the surface of the workpiece with defined focal plane positions that are different in a depth direction and a focal plane position is assigned to each. Image points of the images are respectively assigned to a corresponding object point on the surface. The method includes determining a focus value of each image point of each image. The method includes fitting a function along the depth direction to the focus values of those image points that are assigned to the same object point. The method includes determining a depth value of each object point on the surface in the depth direction based on an extremum of the fitted function. The method includes generating the depth map based on the determined depth values.

Industrial metrology of workpiece surface based on depth map

A method, a computer program product and a measuring system are provided for operating a triangulation laser scanner to identify surface properties of a workpiece. The scanner has a CMOS sensor chip, an imaging optical unit, and a laser line light source configured to generate a laser line on the workpiece in compliance with a Scheimpflug condition. Data generated on the sensor chip is reduced to an amount of data only including actual lateral positions of image points of the laser line and a quality criterion for each of the image points. The quality criterion is a measure of an intensity distribution along a direction transverse to a local direction of extent of the image points of the laser line on the sensor chip and the reduced amount of data is analyzed with respect to the quality criterion regarding a presence of barcode and/or detection code information and/or texture information.

Method, computer program product and measuring system for operating a triangulation laser scanner to identify properties of a surface of a workpiece to be measured

A calibration pattern having a plurality of pattern regions for calibrating an imaging optical unit for metrological applications. At least one image of the calibration pattern is recorded using the imaging optical unit. The image is evaluated to quantify individual properties of the imaging optical unit. Depending on the quantified individual properties, correction values for a calculated correction of aberrations of the imaging optical unit are determined. The calibration pattern is provided on an electronic display having a plurality of display pixels arranged in the form of a matrix. In addition, a calibration body with at least one line having a defined dimension, is recorded using the imaging optical unit. A magnification factor of the imaging optical unit is determined on the basis of the at least one line. At least one further individual property of the imaging optical unit is quantified on the basis of the calibration pattern.

Method and device for calibrating an imaging optical unit for metrological applications

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Lauingen, Germany

Daniel Plohmann