Other

International Business Machines Corporation

Daniel Boyd Sullivan

Edward W Conrad

Craig E Schneider

John S Smyth

Jed Hickory Rankin

Adam Charles Smith

Brian Neal Caldwell

Raymond Walter Jeffer

Kevin W Collins

Monica J Barrett

Brain Neal Caldwell

A method includes determining defect types and defect locations on a mask blank and storing the defect types and the defect locations. The method further includes generating at least one alignment mark on the mask blank and selecting a mask pattern for the mask blank based on the defect types and the defect locations. Additionally, the method includes determining a positioning of the mask pattern on the mask blank, aligning a mask pattern generator with the mask blank in accordance with the positioning using the at least one alignment mark and forming the mask pattern on the mask blank using the mask pattern generator.

Pre-alignment marking and inspection to improve mask substrate defect tolerance

A system and method of operation for a lithographic system having multiple exposure stations sharing one or more post-expose bake station and a centralized control system that schedules work through the expose station to the post-expose bake station while taking into consideration the patterning time for work pieces to be scheduled as well as the amount of post-expose delay allowable for the exposed work pieces.

Multiple pattern generator integration with single post expose bake station

The present invention comprises a system, software, and method for the treatment of mask data that produces defects in resultant images produced in the fabrication of a mask, following identification of the defects. The invention involves identifying each exposure shot with certain information which when combined with similar information related to the defects is used to control the exposure tool to toggle or modulate the shots related to the defects and thus, eliminate the defects.

Method of compensating for defective pattern generation data in a variable shaped electron beam system

Provided is a caliper extender, which fits over a tape measure blade, enabling accurate measurements to be taken of an inside dimension. Extender slides along blade and is positioned against one wall of the inside dimension. Blade is then repositioned flat against extender and a measurement reading is taken. A pointer may also be incorporated into extender to indicate a tape marking corresponding to an accurate measurement. In the alternative, a caliper extender is incorporated into a tape measure such that extender can be disengaged from a casing of tape measure, slid along a blade and a measurement reading taken through a window in a channel through which blade is installed.

Tape measure clip for improving measurement accuracy

Provided is a caliper extender (), which fits over a tape measure blade (), enabling accurate measurements to be taken of an inside dimension (). Extender () slides along blade () and is positioned against one wall of the inside dimension (). Blade () is then repositioned flat against extender () and a measurement reading is taken. A pointer () may also be incorporated into extender () to indicate a tape marking (or) corresponding to an accurate measurement. In the alternative, a caliper extender () is incorporated into a tape measure () such that extender () can be disengaged from a casing () of tape measure (), slid along a blade () and a measurement reading taken through a window () in a channel () through which blade () is installed.

A system and method for optimizing metrology sampling rates in an advanced process control (APC) application. A method is provided for processing a run of workpieces, the method comprising the steps of: providing a database comprising subgroups of data representing characteristics from previously processed workpieces; selecting a first subgroup of data having characteristics that satisfy a predetermined criteria; determining processing conditions for a processing tool corresponding to said first subgroup of data; processing the run of workpieces with the process tool using the determined processing conditions; and measuring the run of workpieces according to a sampling rate determined from the first subgroup of data.

System and method for optimizing metrology sampling in APC applications

A system and method for optimizing a manufacturing process. The system comprises: a database of operational data gathered from previously performed manufacturing processes; a filtering system for filtering the database into a plurality of data subsets; a calculation system for calculating evaluation criteria for a selected data subset; an analysis system for determining if the evaluation criteria meets a set of predetermined requirements; and an iteration system that selects a new data subset if the selected data subset fails to provide evaluation criteria that meets the set of predetermined requirements.

System and method for optimizing manufacturing processes using real time partitioned process capability analysis

Enhanced voltmeter leads includes load circuitry having a test load that can be switchably coupled between the leads to help identify faults in a circuit under test. In certain embodiments, the value of the test load can be any appropriate value set according to parameters or characteristics of the circuit under test. In these embodiments, the value of the test load can be set manually or automatically or both. The types of faults that can be identified include a short-to-ground, an open circuit, and a high (e.g., corrosive) resistance. The leads include a switch whose setting is adjustable to couple and decouple the test load between the leads. The switch can be located in the leads or in a lead handle of the leads for easy access by a user/technician. The leads can also include a fuse or circuit breaker for safety reasons. The leads can be used systematically to help identify the type and location of a fault from voltage readings. The voltage readings are obtained at various points in the circuit under test with the switch both closed and open. Conventional test leads or the leads that include the switch to couple/decouple the test load can be used if the load circuitry is integrated into the voltmeter or if the load circuitry has a separate coupling or connection to the voltmeter inputs.

Enhancing voltmeter functionality

This invention relates to an apparatus for restraining cargo securely in or on a vehicle seat. In particular, the invention relates to an apparatus for anchoring a strap, cord, or cable to a vehicle seat, which in turn secures and restrains cargo in or on the vehicle seat. The apparatus secures cargo to a vehicle seat with a rear by anchoring a strap to the vehicle seat. It includes an anchor plate and wedge-shaped slotted unit communicably attached to the anchor plate for channeling the strap therethrough, whereby the anchor plate bears against the rear of the vehicle seat, thereby securing the cargo to the vehicle seat.

Vehicle seat cargo restraint anchor

This invention relates to a method for restraining cargo securely in or on a vehicle seat. In particular, the invention relates to a method for anchoring a strap, cord, or cable to the vehicle seat which secures and restrains cargo in or on the vehicle seat. The method secures cargo to a vehicle seat having a rear by anchoring a strap to the vehicle seat. The method includes channeling or threading the strap through a wedge-shaped slotted portion communicably attached to an anchor plate, the strap being tightened around the cargo, whereby the anchor plate bears against the rear of the vehicle seat, thereby securing the cargo to the vehicle seat.

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Edina, MN, United States of America

Daniel Boyd Sullivan