Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Ebara Corporation (1 from 2,510 patents)
1 patent:
1. 10985037 - Substrate cleaning apparatus, substrate cleaning method, and control method of substrate cleaning apparatus