Tokyo Electron Limited

International Business Machines Corporation

Ykk Corporation

Yokogawa Electric Corporation

Nippon Valqua Industries, Ltd.

Covalent Materials Corporation

Tokyo Electric Limited

Daisuke Hayashi

Shinji Iio

Morio Wada

Masayuki Suehiro

Akira Miura

Kazuya Nagaseki

Tsuyoshi Yakihara

Katsuya Ikezawa

Nobuyuki Okayama

Shinji Himori

Jun Ozawa

Fumihiko Terui

Katsuyuki Koizumi

Keisuke Nitta

Chie Sato

Naoki Takayama

Sayaka Tamai

Koichi Kazama

Hidehito Saegusa

Shinji Kobayashi

Tomohiro Shioya

Sadaharu Oka

Tomohiro Shimizu

Taku Aratsu

Jun Ooyabu

Koichi Murakami

Yuto Fukui

Toshifumi Ishida

Kota Kanno

Norihiko Amikura

Hiroshi Koizumi

Hiroki Endo

Dai Kitagawa

Hideki Nagaoka

Masaaki Miyagawa

Hidehito Saigusa

Hirotoshi Kodaka

Wataru Shimizu

Keiki Ito

Kengo Kaneko

Yasukazu Akasaka

Tsuyoshi Shimazu

Satoru Teruuchi

Hiroshi Shimizu

Morihiro Takanashi

Toshiya Tsukahara

Mamoru Hihara

Toshimasa Umezawa

Hayuru Tanaka

Ryohei Nakawatase

Tohru Hasegawa

Masanobu Honda

Tomoyuki Takahashi

Akira Koshiishi

Takuya Goto

Jun Hirose

Takahito Tashiro

Akitaka Shimizu

Shinichi Nakajima

Minoru Honda

Shinya Ishikawa

Akira Toyama

Shoichiro Matsuyama

Kazuhiro Kubota

Takahiro Kudo

Shinsuke Oka

Takashi Mogi

Shin Yamaguchi

Go Takani

Mihoko Hasegawa

Masatomo Kita

Kosuke Imafuku

Ryo Nonaka

Masahiro Dogome

Toshiaki Toyomaki

Yohei Noda

Yoshihiro Umezawa

Hideaki Tanaka

Yoshiyuki Asano

Tadashi Aoto

Shosuke Endoh

Akira Muramatsu

Hiroo Ono

Tadashi Onishi

Yoshio Takamura

Tomonori Miwa

Shin-ichi Nakajima

Takaaki Nezu

Shunsuke Mizukami

Atsushi Kawabata

Koichi Tateshita

Atsushi Matsuura

Takami Fukasawa

Yasuhisa Kudo

Tadashige Fujita

Katsumi Horiguchi

Masato Takayama

Hirokazu Yasumuro

Ryusaku Watanabe

Mechanisms are provided for writing files to tape storage. A set of files to be written to the tape storage are identified and, for each file, metadata associated with the file indicating identifiers of users associated with the file is retrieved. For each file, a predicted frequency metric, specifying a predicted frequency of access of the file, is determined based on the identifiers of users associated with the file specified in the associated metadata. The files are sorted to generate a ranked set of files in which each file is ranked relative to the other files in the set of files based on their corresponding predicted frequency metric. The ranked set of files is written to the tape storage in descending order of predicted frequency metric such that files having relatively larger predicted frequency metrics are written relatively closer to a starting boundary of a partition of the tape storage.

Ordering files in magnetic tape storage

A transfer device for simultaneously or separately transferring a wafer and a consumable part having a circular shape is disclosed. The consumable part is disposed in a wafer processing module, and the outer diameter of the consumable part is larger than the outer diameter of the wafer. The transfer device comprises an end effector configured to place the wafer and the consumable part thereon simultaneously or separately, an arm configured to move the end effector, and a controller configured to control the arm, to place the consumable part on the end effector such that the center of gravity of the consumable part coincides with a first position when transferring the consumable part, and to place the wafer on the end effector such that the center of gravity of the wafer coincides with a second position between the first position and front ends of the end effector when transferring the wafer.

Transfer device, transfer system, and end effector

A snap button can include a snap button body and a fastener connected to the snap button body with a cloth interposed between them, wherein the snap button body includes a button member including a base; and a metal eyelet attached to an inner surface of the base, the inner surface being placed to face the cloth, wherein the button member includes an engaging portion provided on an outer surface opposite to the inner surface of the base, wherein the fastener includes a fastener base and a pin to be swaged, which protrudes from an inner surface of the fastener base, the inner surface being placed to face the cloth, and wherein the eyelet includes a cylindrical portion receiving the pin, the cloth being pierced by the pin, and the pin being swaged on the inner surface of the base of the button member.

Snap button

A measurement part controls power supplied to a heater such that a temperature of the heater becomes constant by using a heater controller, and measures the supplied power in an unignited state in which plasma is not ignited and a transient state in which the power supplied to the heater decreases after plasma is ignited. A parameter calculator performs fitting on a calculation model, which includes a heat input amount from the plasma as a parameter, for calculating the power supplied in the transient state by using the power supplied in the unignited state and the transient state and measured by the measurement part, and calculates the heat input amount. An output part configured to output information based on the heat input amount calculated by the parameter calculator.

Plasma processing apparatus, plasma state detection method, and plasma state detection program

A plasma processing apparatus includes an external circuit electrically connected through a line to an electrical component in a processing chamber and a filter provided on the line to attenuate or block noise introduced into the line from the electrical component toward the external circuit. The filter includes a coil having constant diameter and coil length; a tubular outer conductor accommodating the coil and forming a distributed constant line in which parallel resonance occurs at multiple frequencies in combination with the coil; and a movable member for changing each winding gap of the coil and provided in an effective section where a specific one or a plurality of parallel resonance frequencies is shifted to a higher frequency side or a lower frequency side in frequency-impedance characteristics of the filter by changing the winding gap of the coil in the effective section in a longitudinal direction of the coil.

Plasma processing apparatus

Provided is a male snap button () including a metal male snap body (), and a fixing member () for fixing the male snap body () to a fabric (). The male snap body () includes: a male-side engagement part () in annular shape capable of being removably engaged with a female-side engagement part () of a female snap button (); and multiple claws (). The male-side engagement part () defines an opening () that exposes the fabric () inside in a radial direction thereof. A diameter (D) of the opening () is greater than a length (W) in the radial direction from an outside edge of the opening () in the radial direction to an outside edge of the male snap body () in the radial direction. The fixing member () includes claw accommodation parts () to receive the claws ().

Male snap button and female snap button

A stage for mounting a workpiece and an edge ring is provided, the stage including a first flow path and a second flow path along each of which a fluid flows, within the stage; a bifurcation at which an inlet port of the first flow path and an inlet port of the second flow path are coupled; a junction at which an outlet port of the first flow path and an outlet port of the second flow path are coupled; and a member provided at least one of the bifurcation and the junction, the member having at least one opening that communicates with the first flow path and the second flow path.

Stage and electrode member

A substrate support is provided. The substrate support includes a main body having a substrate supporting region and an annular region surrounding the substrate supporting region. The substrate support further includes a first ring disposed on the annular region and having a through-hole, a second ring disposed on the first ring and having an inner peripheral surface facing an end surface of a substrate on the substrate supporting region. The substrate support further includes a lift pin including a lower rod and an upper rod, wherein the lower rod has an upper end surface to be in contact with the first ring, and the upper rod extends upward from the upper end surface of the lower rod to be in contact with the second ring through the through-hole of the first ring and has a length greater than a length of the through-hole.

Substrate support and plasma processing apparatus

A stage on which a substrate is disposed includes: a base embedded with an adsorption electrode therein; a focus ring provided above the adsorption electrode and adsorbed and held on the base; and a deposit control ring provided radially inside the focus ring on the base. A gap is formed between the focus ring and the deposit control ring in a radial direction to separate the focus ring and the deposit control ring.

Stage and plasma processing apparatus

A substrate support for use in a reaction chamber includes a base, and an in-situ electrostatic chuck. The chuck includes a first electrode in an upper portion of the chuck that is configured to hold a wafer to an upper surface of the upper portion by a first electrostatic attractive force under a condition of a first voltage is applied to the first electrode, and a second electrode that opposes an upper surface of the base and is configured to hold the chuck to the base by a second electrostatic attractive force under a condition that a second voltage is applied to the second electrode. Under a condition that the second voltage is not supplied to the second electrode, the second electrostatic attractive force is not present and the chuck is freed to be replaced in-situ without also removing the base and without exposing the reaction chamber to external atmosphere.

Structure for automatic in-situ replacement of a part of an electrostatic chuck

A placing table on an embodiment includes a supporting member and a base. The supporting member includes a placing region provided with a heater, and an outer peripheral region surrounding the placing region. The base includes a first region supporting the placing region thereon, and a second region surrounding the first region. In the second region, through holes are formed. Wirings electrically connected to the heater passes through the through holes of the second region.

Placing table and plasma treatment apparatus

Disclosed is a stage including: an electrostatic chuck having a substrate placement surface on which a substrate is placed; and an electrostatic chuck placement plate on which the electrostatic chuck is placed. The electrostatic chuck and the electrostatic chuck placement plate are fastened by a plurality of first fasteners from a side of the electrostatic chuck placement plate, and the stage is fastened to a support provided on an opposite side of the electrostatic chuck of the electrostatic chuck placement plate by a plurality of second fasteners on a radially outer side of the placement surface.

Provided is an injection-molded resin button, which does not crack or is unlikely to crack at attaching the button to a fabric. This invention relates to a button including a button body having a through-hole at the center thereof. The button body of the button includes a left half part and a right half part, which are segmented left and right by a virtual straight line passing through a gate position, on the button body, corresponding to a gate of a mold for molding the button and the center of the button body. The button body includes one or more concave portions or one or more convex portions on an outer surface of the button body. The button is characterized in that the concave portions or the convex portions are provided asymmetrically in the left and right half parts. The button body includes a nonlinear weld line at least on the outer surface.

Button

Provided is a snap button in which a swaged portion of a to-be-swaged pin is not visible from users. The snap button comprises a snap button body and a cap to be connected to the snap button body with a cloth interposed between them. The snap button body includes a base; a pin to be swaged, which protrudes from an inner surface of the base, the inner surface being placed to face the cloth; and an engaging portion provided on an outer surface opposite to the inner surface of the base. The cap comprises a cap body including a cap base; and a metal eyelet attached to an inner surface of the cap base, the inner surface being placed to face the cloth. The eyelet comprises a cylindrical portion for receiving the pin which has pierced the cloth and swaging the pin on the inner surface of the cap base.

Growing community of inventors

Nirasaki, Japan

Daisuke Hayashi