Samsung Electronics Co., Ltd.

Semes Co., Ltd.

Dae Seok Choi

Jong Sung Park

Jung Sub Kim

Seung Dae Seok

Chang B Jeong

Eui Sun Choi

Kang San Lee

Min Gu Lee

Dae Ho Min

Young Gun Park

Sang Hoon Jung

Provided are a die pickup module and a die bonding apparatus including the same. The die pickup module includes a wafer stage for supporting a wafer including dies attached on a dicing tape, a die ejector arranged under the dicing tape and for separating a die to be picked up from the dicing tape, a non-contact picker for picking up the die in a non-contact manner so as not to contact a front surface of the die, a vertical driving unit for moving the non-contact picker in a vertical direction to pick up the die and an inverting driving unit for inverting the non-contact picker to invert a die picked up by the non-contact picker.

Die pickup module and die bonding apparatus including the same

Growing community of inventors

Chungcheongnam-do, South Korea

Dae Seok Choi