Micron Technology Incorporated

Scp Global Technologies, Inc.

Curtis R Olson

Paul A Morgan

David A Daycock

Shawn D Lyonsmith

Paul G Lindquist

John J Rosato

Jane Fahrenkrug

Methods for reducing electron beam induced damage on semiconductor substrates employ compositions such as small chain organic solvents and non-neutral pH solutions to reduce or eliminate charge imbalances on semiconductor substrates caused by electron beam inspection of the semiconductor substrates. Damage to semiconductor substrates by electron beam inspection processes may also be reduced by generating or otherwise forming passivation films on a semiconductor substrate following electron beam inspection.

Method of reducing damage to an electron beam inspected semiconductor substrate, and methods of inspecting a semiconductor substrate

Method of reducing electron beam damage on post W-CMP wafers

Semiconductor substrates, particularly metallized substrates such as partially processed wafers, are rinsed with an aqueous medium, preferably deionized water, which further contains an anti-corrosive chemical agent or agents selected so as to minimize corrosion of metals resulting from contact with the water. The amount of anti-corrosive chemical agent is maintained in a controlled manner at a predetermined level or within a predetermined range preferably the rinsing with aqueous medium containing anticorrosive chemical agent is also carried out for a specified time, followed by further rinsing with deionized water alone. The rinsing may be combined, either in the same vessel or in a different vessel, with a subsequent drying step, such as a drying process utilizing a drying vapor introduced into the rinse tank or into a downstream vessel. The drying vapor condenses on the surface of the semiconductor material and reduces the surface tension of residual process fluid, causing the residual process fluid to flow off the surface.

Process and system for rinsing of semiconductor substrates

Growing community of inventors

Boise, ID, United States of America

Curtis R Olson