Freescale Semiconductor,inc.

Motorola Corporation

Nxp Usa, Inc.

Craig T Swift

Gowrishankar L Chindalore

Michael Alan Sadd

Cheong Min Hong

Ko-Min Chang

Erwin J Prinz

Paul A Ingersoll

Ramachandran Muralidhar

Alexander Hoefler

Jane A Yater

Bruce E White

Kuo-Tung Chang

Asanga H Perera

Anirban Roy

James David Burnett

Frank Kelsey Baker, Jr

Robert F Steimle

Richard Eguchi

Thuy B Dao

Laureen H Parker

Marius K Orlowski

Olubunmi O Adetutu

Brian A Winstead

Bruce L Morton

Rajesh A Rao

Chen He

Fuchen Mu

Thomas Jew

Yanzhuo Wang

Shih-Wei Sun

David Burnett

Alexis Marquot

Danny P Shum

Philippe B Bauser

Wei-Ming Chen

Steven G H Anderson

Wei-Hua Liu

Benjamin A Schmid

Sung-Wei Lin

Yun-Kang (Kevin) K Wu

Shiang-Chyong Luo

Lee Z Wang

Christopher B Hundley

Gowrishankar L G Chindalore

A method and memory for stressing a plurality of non-volatile memory cells is provided. The method includes entering a memory cell stressing mode and providing one or more erase stress pulses to the plurality of non-volatile memory cells; determining that a threshold voltage of at least a subset of the plurality of non-volatile memory cells has a first relationship that is either greater than or less than a first predetermined voltage; providing one or more program stress pulses to the plurality of memory cells; and determining that the threshold voltage of at least a subset of the plurality of memory cells has a second relationship to a second predetermined voltage that is different than the first relationship.

Method and apparatus for stressing a non-volatile memory

A split gate memory device includes a semiconductor substrate and a select gate over the substrate. The select gate has a bottom portion and a top portion over the bottom portion, wherein the top portion has a top sidewall and the bottom portion has a bottom sidewall, and wherein the bottom sidewall extends beyond the top sidewall. The devices also includes a control gate adjacent the select gate, a charge storage layer located between the select gate and the control gate and between the control gate and the substrate, and an isolation region over the bottom portion of the select gate and between the top sidewall of the select gate and the charge storage layer. The bottom sidewall of the bottom portion extends to the charge storage layer.

Split-gate non-volatile memory (NVM) cell and method therefor

An operating voltage and reference current are adjusted in a memory device. At least a portion of an array of memory cells is preconditioned to an erased state using an erase verify voltage on word lines coupled to the memory cells and a first reference current in sense amplifiers coupled to bit lines for the array. A test reference current is set for the sense amplifiers. A bitcell gate voltage is set on the word lines to a present overdrive voltage. The at least a portion of the array is read. If any of the memory cells in the at least a portion of the array are read as being programmed, the present overdrive voltage is increased until none of the memory cells in the at least a portion of the array are read as being programmed.

Non-volatile memory (NVM) with endurance control

A semiconductor device includes a semiconductor substrate, a charge storage stack over a portion of the substrate. The charge storage stack includes a first dielectric layer, a layer of nanocrystals in contact with the first dielectric layer, a second dielectric layer over and in contact with the layer of nanocrystals, a nitride layer over and in contact with the second dielectric layer, and a third dielectric layer over the nitride layer.

Split gate memory cell with a layer of nanocrystals with improved erase performance

A low resistance polysilicon (poly) structure includes a first poly coupled to a substrate and having a sidewall. A second poly is separated from the sidewall of the first poly and the substrate by a programming oxide. The first poly and the second poly have substantially a same planarized height above the substrate. The first poly extends from a device region to a strap region, and extends substantially parallel to a first length of the second poly. A second length of the second poly extends away from the first poly in the strap region and includes a salicide. A first diffusion region crosses the first poly and the second poly in the device region. A masked width of the first length of the second poly is defined by an etched spacer. A low resistance contact is coupled to the second length of the second poly in the strap region.

Low resistance polysilicon strap

An integrated circuit including data and code non-volatile memory configuration is provided. The integrated circuit comprises a first non-volatile memory array for storing code and a second non-volatile memory array for storing data. The first non-volatile memory array comprises a plurality of first non-volatile memory cells, the first non-volatile memory cells each having a first channel width. The second non-volatile memory array comprises a plurality of second non-volatile memory cells, the second non-volatile memory cells each having a second channel width. The second channel width of the second non-volatile memory cells is larger than the first channel width of the first non-volatile memory cells. This allows the data non-volatile memory cells to have a higher transconductance than the code non-volatile memory cells.

Embedded data and code non-volatile memory cell configurations

Forming a memory structure includes forming a charge storage layer over a substrate; forming a first control gate layer; patterning the first control gate layer to form an opening in the first control gate layer and the charge storage layer, wherein the opening extends into the substrate; filling the opening with an insulating material; forming a second control gate layer over the patterned first control gate layer and the insulating material; patterning the second control gate layer to form a first control gate electrode and a second control gate electrode, wherein the first control gate electrode comprises a first portion of each of the first and second control gate layers and the second control gate electrode comprises a second portion of each of the first and second control gate layers, and the insulating material is between the control gate electrodes; and forming select gate electrodes adjacent the control gate electrodes.

Methods and structures for charge storage isolation in split-gate memory arrays

A method of making a split gate non-volatile memory (NVM) using a substrate includes etching a recess into an isolation region of an NVM region of the substrate and depositing a conductive layer and a capping layer. A select gate and a control gate are formed in the NVM region, and a dummy gate is formed in a logic region of the substrate. A portion of the capping layer is removed and a salicide block bi-layer is deposited and patterned to form a first opening that exposes a contact portion of the conductive layer over the recess. A silicided region is formed on the contact portion. The substrate is planarized to expose the dummy gate, which is replaced with a metal gate. A second opening is etched through a first interlayer dielectric deposited over the substrate to the silicided region. Contact metal is deposited into the second opening.

Integration of a non-volatile memory (NVM) cell and a logic transistor and method therefor

A method and apparatus are described for forming a first inter-layer dielectric (ILD0) stack having a protective gettering layer () with a substantially uniform thickness. After forming device components () on a substrate (), a gap fill dielectric layer of SATEOS () is deposited over an etch stop layer of PEN ESL () and then planarized before sequentially depositing a gettering layer of BPTEOS () and capping dielectric layer () on the planarized gap fill dielectric layer (). Once the ILD0 stack is formed, one or more contact openings () are etched through the ILD0 stack, thereby exposing the etch stop layer () over the intended contact regions.

First inter-layer dielectric stack for non-volatile memory

A virtual ground memory array (VGA) is formed by a storage layer over a substrate with a conductive layer over the storage layer. The conductive layer is opened according to a patterned photoresist layer. The openings are implanted to form source/drain lines in the substrate, then filled with a layer of dielectric material. Chemical mechanical polishing (CMP) is then performed until the top of the conductive layer is exposed. This leaves dielectric spacers over the source/drain lines and conductive material between the dielectric spacers. Word lines are then formed over the conductive material and the dielectric spacers. As an alternative, instead of using a conductive layer, a sacrificial layer is used that is removed after the CMP step. After removing the sacrificial portions, the word lines are formed. In both cases, dielectric spacers reduce gate/drain capacitance and the distance from substrate to gate is held constant across the channel.

Virtual ground memory array and method therefor

A floating gate memory cell has a floating gate in which there are two floating gate layers. The top layer is etched to provide a contour in the top layer while leaving the lower layer unchanged. The control gate follows the contour of the floating gate to increase capacitance therebetween. The two layers of the floating gate can be polysilicon separated by a very thin etch stop layer. This etch stop layer is thick enough to provide an etch stop during a polysilicon etch but preferably thin enough to be electrically transparent. Electrons are able to easily move between the two layers. Thus the etch of the top layer does not extend into the lower layer but the first and second layer have the electrical effect for the purposes of a floating gate of being a continuous conductive layer.

Programming and erasing structure for a floating gate memory cell and method of making

A method of making a semiconductor device includes providing a first wafer and providing a second wafer having a first side and a second side, the second wafer including a semiconductor substrate, a storage layer, and a layer of gate material. The storage layer may be located between the semiconductor structure and the layer of the gate material and the storage layer may be located closer to the first side of the second wafer than the semiconductor structure. The method further includes boding the first side of the second wafer to the first wafer. The method further includes removing a first portion of the semiconductor structure to leave a layer of the semiconductor structure after the bonding. The method further includes forming a transistor having a channel region, wherein at least a portion of the channel region is formed from the layer of the semiconductor structure.

Back-gated semiconductor device with a storage layer and methods for forming thereof

An electronic device can include discontinuous storage elements that lie within a trench. The electronic device can include a substrate including a trench that includes a wall and a bottom and extends from a primary surface of the substrate. The electronic device can also include discontinuous storage elements, wherein a portion of the discontinuous storage elements lies at least within the trench. The electronic device can further include a first gate electrode, wherein at least a part of the portion of the discontinuous storage elements lies between the first gate electrode and the wall of the trench. The electronic device can still further include a second gate electrode overlying the first gate electrode and the primary surface of the substrate.

Electronic device including discontinuous storage elements

A process for forming an electronic device can include forming a trench within a substrate, wherein the trench includes a wall and a bottom. The process can also include including forming a portion of discontinuous storage elements that lie within the trench, and forming a first gate electrode within the trench after forming the discontinuous storage elements. At least one discontinuous storage element lies along the wall of the trench at an elevation between an upper surface of the first gate electrode and a primary surface of the substrate. The process can also include forming a second gate electrode overlying the first gate electrode and the primary surface of the substrate.

Process for forming an electronic device including discontinuous storage elements

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Austin, TX, United States of America

Craig T Swift