Digital Instruments

University of California

Craig B Prater

Virgil B Elings

David A Grigg

Paul K Hansma

James Massie

Barney Drake

John A Gurley

James M Young

Charles R Meyer

Thomas B Albrecht

William H Hertzog

A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides light emitted from the light source onto point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.

Scanning stylus atomic force microscope with cantilever tracking and

A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which quides light emitted from the light source onto a point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.

A scanning probe microscope and method having automated exchange and precise alignment of probes, wherein one or more additional stored probes for installation onto a probe mount are stored in a storage cassette or a wafer, a selected probe is aligned to a detection system, and the aligned probe is then clamped against the probe mount. Clamping is performed using a clamp which is disabled when removing a replacement probe from the storage cassette, enabled when installing the probe on the probe mount and disabled when releasing the probe at a later time for subsequent probe exchange. Probe alignment is automated using signals from the probe detection system or by forming an optical image of the probe using a camera or similar technique and determining probe positioning using pattern recognition processing of the probe image to allow probe removal and exchange without operator intervention. Techniques for error checking are employed to ensure proper probe installation and operation.

Scanning probe microscope having automatic probe exchange and alignment

A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides a light beam emitted from the laser source onto a point on said cantilever during scanning thereof. A moving laser beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the laser beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.

A universal probe which can be used with many different types of scanning probe microscopes is disclosed. The probe is mounted on a flexible base. The flexible base may either be a flexible cantilevered beam or a flexible membrane. The probe is a sharply tapered probe and forms in general a squat hollow pyramid or cone. The apex of the pyramid or cone has an aperture defined therethrough with a small controlled diameter of the order of 10 to 50,000 Angstroms. The hollow within the probe is filled with a material chosen according to the type of the scanning probe microscope used and the underlying surface. A signal is coupled to the material in the tip of the probe from the scanning probe microscope to interact with the underlying surface.

Growing community of inventors

Santa Barbara, CA, United States of America

Craig B Prater